Princeton Collaborative Research Facility: diagnostics and modeling for plasma material synthesis and processing applications

Y. Raitses, I. Kaganovich, M. Shneider, A. Dogariu, S. Yatom, S. Gershman, I. Romadanov, N. Chopra, W. Villafana, Y. Ussenov, S. Abe
Princeton Plasma Physics Laboratory,
United States

Keywords: Plasma, diagnostics, modeling


Low-temperature plasmas (LTPs) have a wide range of applications in industry, medicine, aerospace, and sustainability. The Princeton Collaborative Low Temperature Plasma Research Facility (PCRF) ( provides expertise and instrumentation for comprehensive characterization of LTPs with the goal of advancing methods of predictive control of LTP. PCRF collaborative users have access to the state-of-the-art research capabilities, including advanced plasma diagnostics (e.g. Laser-Induced Fluorescence (LIF), Two-Photon Absorption LIF, Thomson scattering, Electric Field-Induced Second Harmonic Generation, Hybrid Coherent Anti-Stokes Raman Scattering), a variety of plasma sources, computational codes (e.g. 2-D and 3-D Particle-in-Cell codes and fluid codes), and theory support. Since its launch in 2019, about 80 user collaborators from the plasma and a broader scientific community, including academia and industry, have been awarded runtime at the PCRF. The projects cover: i) plasma-solid and plasma-liquid interactions, ii) plasma transport, iii) collective phenomena in LTP, iv) use of LTP in modern applications, including plasma processing and synthesis of materials. In this presentation, we will discuss PCRF research capabilities, recent user projects with focus on processing and synthesis of materials relevant to microelectronics and quantum information systems (e.g. diamond) and nanomaterials (carbon and boron nitride nanotubes, boron-carbon-nitride nanosheets, graphene), and opportunities for collaboration. This work was performed under the U.S. Department of Energy through contract DE-AC02-09CH11466.