Bandgap control of molybdenum disulfid thin-film transistor by tip-based nanolithography

J-W Jang
Dongguk University,

Keywords: molybdenum disulfid, tip-based nanolithography, dip-pen nanolithography, gold (III) chloride


Gold (III) chloride (AuCl3) is a well-known electron acceptor (p-type dopant). Here, the electron donor or acceptor behavior of a AuCl3 dopant on a molybdenum disulfide (MoS2) thin-film transistor (TFT) is demon- strated by line patterning a concentration-adjusted AuCl3 ink with dip-pen nanolithography (DPN). At a low ink concentration (clow) (