Semiconductor manufacturing for meta-optics

W.T. Chen
United States

Keywords: metasurface, nano-optics, semiconductor manufacturing, imaging and sensing


What difference would it make if one day all optical components could be shrunk to a thickness less than a millimeter and integrated on semiconductor sensors? Meta-optics, optical components consisting of sub-wavelength nanostructures, emerges as a promising way towards the realization. In the past few years, meta-optics has progressed rapidly from laboratory to mass production, propelled by the vision that semiconductor foundries will manufacture not only semiconductor sensors but also meta-optical components using the same technology of deep ultraviolet lithography. In this talk, I will give an overview about the efforts from industry, explain the uniqueness of meta-optics compared with the traditional ones (refractive and diffractive optics) and highlight recent major advances.