MEMS & NEMS Devices, Modeling & Applications

Symposium Co-Chairs

William (Cy) Wilson
Electronics Engineer
NASA Langley Research Center

Ronald A. Coutu
Professor and V. Clayton Lafferty Endowed Chair
Marquette University

Key Speakers

MEMS are becoming 3D and atomically precise
Andrei Shkel
Professor, University of California, Irvine

Microtales at microscale: from polymer CMUT array for ultrasound imaging to sliding mode control of MEMS devices
Edmond Cretu
Associate Professor, Electrical and Computer Engineering, The University of British Columbia, Canada

RF MEMS Switches and High-Q Varactors: From the Lab to Commercial Products and Their Applications
Gabriel M. Rebeiz
Professor, Electrical and Computer Engineering, University of California, San Diego

Symposium Sessions
	Wednesday May 16
8:30	MEMS & NEMS
1:30	Biosensors & MEMS
3:30	Sensors: Posters
3:30	MEMS & NEMS: Posters

Symposium Program
	Wednesday May 16

8:30	MEMS & NEMS	263 C
	Session chair: William (Cy) Wilson, NASA Langley Research Center, US
8:30	MEMS are becoming 3D and atomically precise (invited presentation) A.M. Shkel, University of California, Irvine, US
8:55	Microtales at microscale: from polymer CMUT array for ultrasound imaging to sliding mode control of MEMS devices (invited presentation) E. Cretu, The University of British Columbia, CA
9:20	Voltage controlled Resistive and Capacitive Response of Nematic Liquid Crystal (LC) and LC Composites for DC and RF Switching Applications (invited presentation) M. Munna, T. Nandy, R.A. Coutu_Jr., Marquette University, US
9:45	Display Compatible pMUT Device for Mid Air Ultrasound Gesture Recognition C.H. Huang, L. Demi, S. Mao, Y. Jeong, D. Cheyns, X. Rottenberg, V. Rochus, imec, BE
10:05	Numerical Simulation of Pulsed Electromagnetic Field Tissue Therapy V. Sukhotskiy, L.K. Marepalli, A. Verma, J. Fournier, G. Gellman, W. Bacon and E.P. Furlani, University at Buffalo, US
10:25	RF MEMS: From the Lab to Commercial Products and Their Applications (invited presentation) G. Rebeiz, University of California, San Diego, US

1:30	Biosensors & MEMS	252 A
	Session chair: Martin E. Poitzsch, Aramco Research Center, William (Cy) Wilson, NASA, US
1:30	Deep Learning-enabled Computational Imaging and Sensing (invited presentation) A. Ozcan, University of California, Los Angeles, US
1:55	Fully Transparent Field-Effect Biosensors X. Du, G.S. Herman, Oregon State University, US
2:15	Fast-reacting smart hydrogel-based sensor platform for biomedical applications J. Koerner, C.F. Reiche, H-Y Leu, J. Magda, F. Solzbacher, University of Utah, US
2:35	Urea Electrolysis as a Medical Devices Platform G.G. Botte, Ohio University - Center for Electrochemical Engineering Research, US
2:55	A novel co-resonantly coupled cantilever sensor platform J. Koerner, University of Utah, US
3:15	Analytical Modeling of Microfluidic Cantilever Sensor with Evaporating Ethanol L. K. Marepalli, V. Sukhotskiy, I. V. A. K. Reddy, A. Verma and E. P. Furlani, University at Buffalo, US
3:35	Silicon lens arrays for wafer level packaging of IR-sensors A. Kulkarni, V. Stenchly, J. Quenzer, R. Dudde, Fraunhofer Institute Silicon Technology, DE

3:30	Sensors: Posters	2nd Floor
	CMOS compatible gas sensor for selective detection of volatile organic compounds (VOCs) J. Hayon, Tel Aviv University, IL
	Micro-Sized Power Controllers for Space K. Frohling, Iris Technology, US
	Mobile data collection system for next generation transportation systems management and operations P. Bhavsar, N. Bouaynaya, Rowan University, US
	Label-free Quantitative Sensing in Single Living Cell with Nano-cavity Antenna assisted Plasmonic Nanowire Endoscope S. Kim, Y. Zhu, L. Apontti, R. Yan, University of California, Riverside, US
	Reusable Biosensor for Detecting Diabetes by Microwave LC Resonator on Integrated Passive Design (IPD) Process E.S. Kim, Z. Chuluunbaatar, C. Wang, Z. Yao, K.K. Adhikari, N.Y. Kim, Kwangwoon University, KR
	High-Sensitivity and Low-Hysteresis Inter-digital Type Capacitive Humidity Sensor on Glass Substrate by Aerosol Deposited BaTiO3 E.S. Kim, Z.J. Wang, C. Wang, Z. Yao, J.G. Liang, N.Y. Kim, Kwangwoon University, KR
	A Microfluidic Aspirator based Platform for Flow and Viscosity Sensing for Automated Tissue Culture Applications J. Mcfall, T. Huang, D. Purcell, K. Haffey, S. Ghosh, A. Azad, P. Nath, Los Alamos National Lab, US

3:30	MEMS & NEMS: Posters	2nd Floor
	An Effective Mobility Model for Tunneling Double-Gate MOSFET ( T-FinFET) X. He, J. Pan, J. Liu, C. Li, G. Hu, G. Ma, J. He, M. Chan, SoC Key Laboratory, Peking University Shenzhen Institute and PKU-HKUST Shenzhen-Hong Kong Institution, CN
	Hot Carrier Effect and Oxide Reliability of T-FinFET Devices X. He, G. Hu, C. Li, Y. He, J. Liu, G. Ma, J. He, J. Pan, SoC Key Laboratory, Peking University Shenzhen Institute and PKU-HKUST Shenzhen-Hong Kong Institution, CN

This symposium focuses on emerging, industrially relevant, applications and advanced fabrication, modeling, materials, and devices, for Micro Electro Mechanical Systems (MEMS), Nano Electro Mechanical Systems (NEMS) and sensors. Submit your technical abstract today and join the leading innovators from industry, academic and government laboratories around the world at this important event.