Complex heterogeneous environment based on Coventor MEMS+ and Matlab/SIMULINK software for modeling and simulation MEMS Gyroscope sensors

J. Nazdrowicz, M. Szermer, B. Sakowicz, A. Napieralski
Lodz University of Technology,
Poland

Keywords: Coventor MEMS+, MEMS gyroscope, modeling, simulation, Matlab, SIMULINK

Summary:

Modeling and simulations of microsystems play a huge role in the modern world. The MEMS design process, despite its simplicity of operation, is not easy. We must remember that we design devices of extremely small sizes (size of a few micrometers); additionally, some imperfections in the production process of the device may have a very destructive impact for later use and usability. MEMS modeling software using the Finite Element Method is a natural choice, but - as it turns out - not the only one. It must be taken into account that the design of a complex MEMS system and simulations take a lot of time, and once the system achieves the appropriate parameters in simulation - it has to be transferred to the ASIC design software, remembering that the MEMS is also a structure in which similar production processes as in the production of ASICs are used, and what is more – the fabrication is on the same substrate). The problem of MEMS design is quite complex and multidimensional in nature. The authors present heterogeneous environment for modeling and simulation MEMS motion sensors including the Coventor MEMS+ and Matlab/SIMULINK software. They propose also MEMS Gyroscope structures, modeled and simulated with these environment based on his own experiences with software. These simulations includes: eigenmode analysis, AC analysis, DC analysis and sensitivity analysis, these results are obtained with different geometry and dimensions of beams presented. Author also presents results of AC rotation response, AC Displacement response in frequency domain, acceleration sensitivity analysis and sidewall angle effect on Coriolis response with different geometrical dimensions of MEMS model.