A Neural Network Method to Model Nanoscale FinFET Performance

J. He
Peking University Shenzhen SoC Key Lab,

Keywords: nanometer FinFET, compact modeling and simulation, network method, accuracy


This paper presents a neural network method to model nanometer FinFET performance. The principle of this method is firstly introduced and its application in modeling DC and conductance characteristics of nanoscale FinFET transistor is demonstrated in details. It is shown that this method does not need parameter extraction routine while its prediction of the transistor performance has a small relative error within 1% compared with measure data, thus this new method is as accurate as that physics based surface pontential model.