R. Mittmann Reis and S.E. Lyshevsk
Rochester Institute of Technology,
Keywords: thermocouple, thermopile, semiconductor, temperature measurement
Summary:The constantly growing needs for solid-state temperature sensors motivates micromachined thermopile sensors [1-11]. We examine the Seebeck effect and discuss the the key physical parameters and characteristics. The micromachined microstructures are designed and fabricated. We examine miniaturized thermopile detectors.