Self-Sustained Infrared Temperature Sensor Arrays

R. Mittmann Reis and S.E. Lyshevsk
Rochester Institute of Technology,
United States

Keywords: thermocouple, thermopile, semiconductor, temperature measurement


The constantly growing needs for solid-state temperature sensors motivates micromachined thermopile sensors [1-11]. We examine the Seebeck effect and discuss the the key physical parameters and characteristics. The micromachined microstructures are designed and fabricated. We examine miniaturized thermopile detectors.