TechConnect Innovation Program

Low-cost batch fabrication of high aspect ratio AFM tips

University of Waterloo - WatCo, Ontario, Canada

TECHNOLOGY SUMMARY

This technology is a fabrication process for high aspect ratio Atomic force microscope (AFM) tips. The key feature is that it is a low-cost batch fabrication process with potentially high yield. The process starts from a regular pyramid-shaped tips wafer, process them simultaneously to produce high aspect ratio tips.

Primary Application Area: Instrumentation & Manufacturing

Technology Development Status: Proven Manufacturability

Technology Readiness Level:

FIGURES OF MERIT

Value Proposition:

SHOWCASE SUMMARY

Organization Type: Academic/Gov Lab

Showcase Booth #: 940

Website: www.uwaterloo.ca

GOVT/EXTERNAL FUNDING SOURCES

Government Funding/Support to Date: