NanoFab: Manufacturing & Instrumentation

NanoFab: Manufacturing & Instrumentation

Symposium Co-Chairs

Jason HaaheimJason Haaheim
Senior R&D Engineer
NanoInk, Inc.
Guy A. DeRoseGuy A. DeRose
Associate Director of Technical Operations
Kavli Nanoscience Institute, CALTECH
Aaron SteinAaron Stein
Electronic Materials: Nanofabrication
Brookhaven National Laboratory

Confirmed Invited Speakers

Jason HaaheimJason Haaheim
Senior R&D Engineer
NanoInk, Inc.
Aaron SteinElectron Beam Lithography for Synchrotron Applications
Aaron Stein
Electronic Materials: Nanofabrication, Brookhaven National Laboratory
Sameer WalavalkarThree-Dimensional Etching of Silicon for the Fabrication of Low-Dimensional and Suspended Devices
Sameer Walavalkar
Post-doctoral Scholar, California Institute of Technology

Special Session: Reconfigurable Nanofabs for Nanoscale Printing of Electronics and Sensors

Ahmed BusnainaAdvanced Nanomaterials-based Manufacturing Platform for Printed Sensors, Electronics, Energy and Material Applications
Ahmed Busnaina
Director, NSF Nanoscale Science and Engineering Center for High-rate Nanomanufacturing (NSEC), Northeastern University
David J. ArthurSingle-wall and Specialty Multi-wall Carbon Nanotubes for Electronics & Composites Applications
David J. Arthur
Chief Executive Officer, SouthWest NanoTechnologies (SWeNT)
Joey MeadNanofabrication Using Polymer Based Materials
Joey Mead
Co-Director, Nanomanufacturing Center of Excellence, UMass Lowell
Glen P. MillerState-of-the-Art Organic Semiconductors for Printed Electronics
Glen P. Miller
Associate Director, Center for High-rate Nanomanufacturing, University of New Hampshire

Symposium Sessions

Monday May 13

11:00Reconfigurable Nanofabs for Nanoscale Printing of Electronics and Sensors
11:00Chemistry and Materials Science for a Sustainable Future: BASF Special Session
2:00Organic & Flexible Electronics I
2:00Innovation Spotlights: Advanced Materials I
4:00Innovation Spotlights: Electronics, Security & Defense
4:30Strategic Partnership & Nanotech Opportunities in China
4:30TechConnect Poster Session I & Reception
NanoFab: Advanced Nanoscale Fabrication I - Posters 4:00

Tuesday May 14

11:00Organic & Flexible Electronics II
Sustainable Nanomanufacturing NNI Signature Initiative - Posters 1:30
NanoFab: Advanced Nanoscale Fabrication II - Posters 1:30
3:00Innovation Spotlights: Materials & Chemicals
3:00NanoFab: Advanced Patterning & Fabrication Methods

Wednesday May 15

8:30NanoFab: Advanced Processing
11:00Sustainable Nanomanufacturing I - NNI Signature Initiative
2:00Sustainable Nanomanufacturing II - NNI Signature Initiative
2:00Innovation Spotlights: Materials & Chemicals

Symposium Program

Monday May 13

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11:00Reconfigurable Nanofabs for Nanoscale Printing of Electronics and SensorsPotomac 3
Session chair: Ahmed Busnaina, Northeastern University, US
11:00Nanofabrication Using Polymer Based Materials (invited presentation)
J. Mead, C. Barry, J. Whitten, R. Nagarajan, University of Massachusetts Lowell, US (bio)
11:25Advanced Nanomaterials-based Manufacturing Platform for Printed Sensors, Electronics, Energy and Material Applications (invited presentation)
A. Busnaina, Northeastern University, US (bio)
11:50CANCELED - State-of-the-Art Organic Semiconductors for Printed Electronics (invited presentation)
G.P. Miller, University of New Hampshire, US (bio)
12:15Single-wall and Specialty Multi-wall Carbon Nanotubes for Electronics & Composites Applications (invited presentation)
D.J. Arthur, SouthWest NanoTechnologies (SWeNT), US (bio)
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11:00Chemistry and Materials Science for a Sustainable Future: BASF Special SessionPotomac 2
-Chemistry & Materials for a Sustainable Future
S. Dimovski, BASF, US
-D. Blackwood, BASF, US
-P. France, MeadWestvaco, US
-C. Machemer, The Rockefeller Group, US (bio)
-W. Rensink, Shell International Exploration and Pro Game Changer, US (bio)
-R. Goerck, BASF, US (bio)
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2:00Organic & Flexible Electronics IAzalea 1
Session chair: Anupama B. Kaul, National Science Foundation, US
2:00National Science Foundation’s Organic and Flexible Electronics Programs in the Engineering Directorate (invited presentation)
A.B. Kaul, National Science Foundation, US (bio)
2:25Flexible thin films based on nanostructured polymeric composites as ultra sensitive piezoresistive materials and their applications
E. Laukhina, R. Pfattner, L.R. Ferreras, M. Mas-Torrent, V. Laukhin, C. Rovira, J. Veciana, Institut Ciencia de Materials de Barcelona (CSIC)/CIBER-BBN, ES
2:45Effects of Inter-molecular and Electrode Interfaces on Photovoltaic Processes in Organic Solar Cells (invited presentation)
B. Hu, University of Tennessee, US (bio)
3:10Ultra-stretchable, Flexible, and Self-Healing Electronics Using a Micromoldable Metal
J.-H. So, M.R. Khan, C. Eaker, M. Mohammed, M.D. Dickey, NC State University, US
3:30An Integrated Approach Toward High Performance Materials and Contacts for Organic Solar Cells (invited presentation)
D.C. Olson, National Renewable Energy Laboratory (NREL), US (bio)
3:55High-Efficiency and Stretchable Polymer Light Emitting Diodes (invited presentation)
Q. Pei, UCLA, US (bio)
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2:00Innovation Spotlights: Advanced Materials IPotomac 1
Session chair: Matthew Laudon, TechConnect, Reviewers: Bayer MaterialScience, Momentive, MeadWestvaco (MWV)
2:00Bayer - Strategic Innovation Interests
K. Halder, Bayer MaterialScience, US
2:15Momentive - Strategic Innovation Interests
D. Rusinko, Momentive, US (bio)
2:30MeadWestvaco - Strategic Innovation Interests
P. France, MeadWestvaco, US
3:00Single Molecule Traps
J.M. Ornstein, framergy®, US
3:07Nanocellulose and its Thermoplastic Composite Material
D. Lim, Korea Institute of Industrial Technology(KITECH), US
3:14Correlated Magnetics
S. Evans, Correlated Magnetics Research, LLC., US
3:21Photonic Ink (P-Ink)
A. Arsenault, Opalux Inc., CA
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4:00Innovation Spotlights: Electronics, Security & DefensePotomac 1
Session chair: Thomas Gillespie, In-Q-Tel, US
4:00OCR type Direct Bonding for Touch Screen Panel
S. O, GMT Co. Ltd., US
4:07A Multi-Function Glove for Harsh Environments
D. Lerch, Institute for Disabilities Research and Training, US
4:14Surface Acoustic Wave Sensor Network utilizing a Unique Orthogonal Frequency Coding Method to Individually Identify Sensors in a Multi-sensory Network
A. Adkins, University of Central Florida, US
4:21Angular Slice True 3D Display (AS3D)
P. Jones, Third Dimension Technologies, LLC, US
4:28Magnetic cooling in semiconductors
M. Weber, McGill University, CA
4:35Precise Sensor Nanomaterial
D. Benedict, Louisiana State University, US
4:42The Molecular Property Spectrometer (MPS™): Chip-based chem-sensing and protein screening
J. Adams, NevadaNano, US
4:49BZN Pyrochlore Thin Films
D. Fecko, Penn State Materials Research Institute, US
4:56Peel-and-Stick Process: Fabrication process for thin film electronics on universal substrates.
C.H. Lee, Stanford University, US
5:03Proactive Cybersecurity
S. Hariri, AVIRTEK, US
5:10IDentia - Extensible Cloud Security Solution for the Enterprise
N. Duan, D-Tech, LLC, US
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4:30Strategic Partnership & Nanotech Opportunities in ChinaExpo Hall A
-Z. Xijun, Suzhou Nanotech Co., Ltd., CN
-C. Linsen, SVG Optronics Co., Ltd., CN
-C. Zheng, Chinese Academy of Sciences, CN
-W. Juinzuo, Mesolight LLC, CN
-H. Zhejun, Polynova Co., Ltd., CN
-L. Feng, NanoBrite Co., Ltd., CN
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4:30TechConnect Poster Session I & ReceptionExpo Hall A
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NanoFab: Advanced Nanoscale Fabrication I - Posters 4:00Expo Hall A
-Magnetic Resonance Force Microscopy using a Commercially Available SPM Unit
S. Won, J. Heo, Korea Institute of Materials Science, KR
-Analysis of materials Surfaces: Sb-SnO2 and In2O3 used as spatial gas sensors
O. Abdallah, Université de Khemis Miliana, DZ
-Charge transport in percolating network of bimetallic nanoclusters
A.I. Ayesh, S.T. Mahmoud, N. Qamhieh, United Arab Emirates University, AE
-Production of Core/shell/shell-Nanoparticles in a Continuous Flow Reactor
D. Ness, V-H Tran, J. Niehaus, H. Weller, CAN GmbH, DE
-Template-Free Single-Step Fabrication of Metal Oxide Hollow Nanospheres and Nanofoams
X. Jiang, Changzhou University, CN
-Electrically conductive polypropylene fibers and tapes
F. Martin, Centre of Advanced Surface Engineering-AIN, ES
-Characteristics of Grooving by Diamond Needle-Tip with Various Tip Shapes and Grooving Parameters
V. Mladenovic, R&D - New technologies, SI
-Synthesis of Stabilized Silver nanoparticles exposed to Hydrochloric Acid
A.M. Atta, H.A. Allohedan, A. Ezat, Z.A. Issa, King Saud Unversity, SA
-Low-Cost Nano-Manufacturing of Surface Acoustic Wave Devices by Use of Jet & Flash Nano Imprint Lithography
C.M. Pedersen, L. Braun, S. Ballandras, V. Plessky, P. De Joffrey, P. Boillot, S. Renaud, E. Girardet, T.H. Bro, B. Bilenberg, F. Gegot, Z.J. Davis, Danish Technological Institute, DK
-CMOS Heterogeneous Sensor Arrays of Nanomaterials for Sensing
S. MacNaughton, K. Park, S. Sonkusale, Tufts University, US
-Integration of SiNWs on MOSFET Gate terminal: From device fabrication to electrical characterization
M. Taghinejad, H. Taghinejad, A. Saeedi, M. Abdolahd, S. Mohajerzadeh, University of Tehran, IR
-Nanofabrication at the Sub 10 nm Length Scale Using Helium and Neon Ion Microscopy
D. Elswick, M. Ananth, C. Huynh, L. Stern, Carl Zeiss Microscopy, US
-Three dimensional metal film catalyst assisted etching of silicon
W. Sheng, T. Shi, B. Sun, X. Tan, T. Jiang, G. Liao, Huazhong University of Science and Technology, CN

Tuesday May 14

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11:00Organic & Flexible Electronics IIWoodrow Wilson D
Session chair: Anupama B. Kaul, National Science Foundation, US
11:00Roll-to-Roll Fabrication of Nanostructured Materials and Devices (invited presentation)
J. Watkins, University of Massachusetts Amherst, US (bio)
11:25Improving Resolution for Roll-to-Roll Printed Electronics
H. Zhang, W.J. Suszynski, A. Ramm, S. Lim, University of Minnesota, US
11:45High-mobility Self-patterned Organic Thin-Film Transistors (invited presentation)
O.D. Jurchescu, Wake Forest University, US (bio)
12:10Printable Nanomaterials and Devices (invited presentation)
Z. Cui, Suzhou Institute of Nanotech, CN (bio)
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Sustainable Nanomanufacturing NNI Signature Initiative - Posters 1:30Expo Hall A
-Nanospray Combustion Processing Technology for Nanomaterials Fabrication
Y. Jiang, C. Durkin, D. Lyman, D. Rajamani, A.T. Hunt, nGimat Co., US
-Process intensification: an integrated nanoparticle formation scheme based on Flash NanoPrecipitation
R.K. Prud’homme, Princeton University, US
-Scalable Manufacturing of Nanopowders by Solution Combustion Processing
G. Venugopal, D. Dressler, D. Webster, S. Johnson, J. Stieha, T. Brandenburg, A. Hunt, nGimat LLC, US
-Production of Glass Nanofibers with tailored compositions by Laser Spinning
F. Quintero, J. Penide, R. Comesaña, F. Lusquiños, A. Riveiro, J. Pou, Universidad de Vigo, ES
-Ultrafast synthesis of nanomaterials using microwave
X. Zhang, Auburn University, US
-A hybrid method for mass production of Single Wall Carbon Nanotubes (SWCN)
C. Marin, University of Puerto Rico at Mayaguez, US
-A Low Cost, Modular and Reconfigurable Manufacturing Cell for Construction of Heterogeneous Micro-Nano Systems
A.N. Das, S. Savoie, University of Texas at Arlington Research Institute (UTARI), US
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NanoFab: Advanced Nanoscale Fabrication II - Posters 1:30Expo Hall A
-The C-TVA plasma source – a chemical vacuum thin film deposition tool
C.C. Surdu-Bob, M. Badulescu, INFLPR, RO
-Optical Nanofabrication at 2nm
E. Pavel, S. Jinga, B.S. Vasile, G. Kada, A. Sasahara, N. Tosa, A. Matei, Storex Technologies, RO
-Direct Observation of Nanofabrication using the Optical Microscope combined with Nanopipette/QTF-AFM System
S. An, C. Stambaugh, S. Kwon, K. Lee, B. Kim, Q. Kim and W. Jhe, Seoul National University, KR
-Tuning the Size of Pd Metal Nanoparticles on Rosette Nanotube Scaffolding: A Kinetic Study
M.R. Hassan, H. Fenniri, University of Alberta, CA
-Compact MEMS/NEMS Characterization Platform Using a DVD Optical Pick-up Unit with Optical Imaging Function
C-H Chen, T. Larsen, S. Schmid, H-S Liao, I-S Hwang, A. Boisen, E-T Hwu, Academia Sinica, TW
-3D Printing of Double Ka Band Helical Antenna
A.-M. Lanouette, J. Hill, P.D. Dussault, J.-J. Laurin, D. Therriault, École Polytechnique de Montréal, CA
-Gas chromatographic study of isoamyl acetate and its photo-catalyzed product obtained from the activity of Ag/TiO2/BC composite
S. Pookboonmee, K. Laohhasurayotin, National Nanotechnology Center, National Science and Technology Development Agency, TH
-The role of target warming in the synthesis of silicon nanoparticles by picosecond laser ablation in liquid
D.M. Popovic, A.A. Zekic, M. Trtica, J. Stasic, University of Belgrade-Faculty of Physics, RS
-Self-Propelled Nanojets via Template Electrodeposition
G. Zhao, A. Ambrosi, M. Pumera, Nanyang Technological University, SG
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3:00Innovation Spotlights: Materials & ChemicalsPotomac 1
Session chair: Keith Ritala, KERTECH & Associates, Reviewers: Alex Norman, United Technologies Research Center, Larry Mann, Global Advanced Metals, US
3:00Environmentally friendly High Performance Acrylonitrile Manufacturing Process
D.H. Cho, Korea Research Institute of Chemical Technology (KRICT), US
3:07Titanium Metal Injection Molding
P. Christensen, Pacific Northwest National Laboratory, US
3:14Environmentally Safe Plastic Microbeads for Cosmetics
J. McDevitt, College of William and Mary, US
3:21CVD Graphene Barrier and Conductive Films for Flexible Organic Electronics
M. Patterson, Graphene Frontiers, US
3:28Architected Materials
M. Tilley, MalibuIQ, Architected Materials LLC, US
3:35Carbon nanotube sheet, tape and wire production systems
M. Gurau, Nanocomp Technologies, US
3:42Heavy-Metal Free Anti-Corrosion Coating Platform Technology
S. Wang, AnCatt, US
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3:00NanoFab: Advanced Patterning & Fabrication MethodsAnnapolis 3-4
Session chair: Guy A. DeRose, Kavli Nanoscience Institute, CALTECH, US
3:00Electron Beam Lithography for Synchrotron Applications (invited presentation)
A. Stein, Brookhaven National Laboratory, US (bio)
3:20Patterning of Periodic Structures Using Continuously Moving Stage
J. Klingfus, J.E. Sanabia, K.E. Burcham, M. Kahl, Raith USA, US
3:40Purification of EBID structures of noble metals by electron beam post-irradiation under oxygen flux
S. Mehendale, J.J.L. Mulders, P.H.F. Trompenaars, FEI Electron Optics, NL
4:00Nanomanipulators with reduced hysteresis and interferometers build in NanoFabs
P.N. Luskinovich, V.A. Zhabotinskiy, NANOmeter Standard GmbH, DE
4:20Patterned Atomic Layer Deposition on Scanning Tunneling Microscope constructed templates
A. Azcatl, J. Ballard, Y. Chabal, K.-J. Cho, D. Dick, J. Owen, R. Longo, S. McDonnell, G. Mordi, J. Randall, R. Wallace, Zyvex Labs, US
4:40A novel route for fabricating Printable Photonic Devices with a high refractive index
C. Pina-Hernandez, V. Lacatena, A. Polyakov, G. Calafiore, S. Dhuey, D. Olynick, S. Babin, S. Cabrini, C. Peroz, aBeam Technologies, US
5:00Fast, robust and simple all optical far-field nano-positioning measurements
M.L. Juan, N. Tischler, I. Fernandez-Corbaton, X. Zambrana-Puyalto, X. Vidal, G. Molina-Terriza, QISS, AU
5:20Nanopatterned coatings for advanced glass products
I. McMackin, J. Geddes, M. Aryal, O. Seitz, B. Kobrin, Rolith, Inc., US

Wednesday May 15

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8:30NanoFab: Advanced ProcessingChesapeake 7-9
Session chair: Aaron Stein, Brookhaven National Laboratory, US
8:30Three-Dimensional Etching of Silicon for the Fabrication of Low-Dimensional and Suspended Devices (invited presentation)
S.S. Walavalkar, A.P. Homyk, A. Scherer, California Institute of Technology, US (bio)
8:55Sub-10 nm silicon nano-structures based on block copolymer lithography and high selectivity cryogenic temperature dry etching
D.L. Olynick, Z. Liu, S. Cabrini, X. Gu, T.P. Russell, V. Ishchuck, I.W. Rangelow, Lawrence Berkeley National Laboratory, US
9:15Decoupling the smoothness, diameter and pitch in large silicon nanowire arrays made by metal-assisted chemical etching (MACE)
J. Yeom, D. Ratchford, C.R. Field, P.E. Pehrsson, Naval Research Laboratory, US
9:35Fabrication and Characterization of PEDOT Nanowires Based on Self Assembled Peptide Nanotube Lithography
N. Ormstrup Christiansen, K.B. Andersen, J. Castillo-León, W.E. Svendsen, N. Rozlosnik, Technical University of Denmark, DK
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11:00Sustainable Nanomanufacturing I - NNI Signature InitiativeChesapeake D-F
Session chair: Paul Kladitis, National Reconnaissance Office, US
11:00Sustainable Nanomanufacturing – Creating the Industries of the Future (invited presentation)
J. Alexander Liddle, National Institute of Standards and Technology, US (bio)
11:25“The 2013 NCMS-NSF Nanotechnology Industry Commercialization Readiness Study Project”
M. Mehta, National Center for Manufacturing Sciences (NCMS), US
11:45Functional Devices via Additive Driven Self-Assembly and Nanoimprint Lithography: Towards Solution-Based R2R Fabrication (invited presentation)
J.J. Watkins, University of Masssachusetts, US
12:10Scalable Nanopatterning using Roll-based Jet and Flash Imprint Lithography
S. Ahn, M. Ganapathisubramanian, M. Miller, J. Yang, J. Choi, M. Menezes, F. Xu, P. Hellebrekers, D. LaBrake, D.J. Resnick, S.V. Sreenivasan, Molecular Imprints Inc., US
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2:00Sustainable Nanomanufacturing II - NNI Signature InitiativeChesapeake D-F
Session chair: Alex Liddle, NIST, US
2:00Environmentally Benign Nano-manufacturing (invited presentation)
J. Dorr, Nanocomp Technologies, Inc., US (bio)
2:25Effect of Electron Beam Irradiation on the Tensile Properties of Carbon Nanotube Sheets and Yarns (invited presentation)
T.S. Williams, S.G. Miller, J.S. Baker, L.S. McCorkle, M.A. Meador, NASA Glenn Research Center, US (bio)
3:15Commercialization Challenges for Nanotechnology: A small company perspective (invited presentation)
L. Criscuolo, Zyvex Technologies, US (bio)
3:40Pioneering Nanostructures into Applications by Optimizing Structure-Property-Processing Relationships (invited presentation)
E.M. Silverman, Northrop Grumman Aerospace Systems, US (bio)
4:05Rapid Deposition of Graphene Layers in MxRAM Devices
B. Boerger, S. Garcia, VersufleX Technologies LLC, US
4:25Novel Nanostructured Coatings onto Particles by Atomic Layer Deposition, Their Method of Manufacture, and Feasibility of Scale and Economics
J. Spencer, A. Weimer, ALD NanoSolutions, US
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2:00Innovation Spotlights: Materials & ChemicalsPotomac 1
Session chair: Chair: David Novak, Inventis Group, Review Board: Goran Matijasevic, UC Irving, Brian Johnston, Innovation Accelerator
2:00Compositions of Degradable Salt-Responsive Copolymers
J. Propst, University of South Carolina, US
2:07Non-Dispersive Solvent Extractions and Reactions
J. Massingill, CHEMTOR, L.P., US
2:14Newlight: From Greenhouse Gas to Plastic
M. Herrema, Newlight Technologies, LLC, US
2:21Nanosegregated Surfaces as Catalysts for Fuel Cells (IN-07-054)
N. Markovic, Argonne National Laboratory, US
2:28Embedded Photonic Crystals for Use in LEDs and Lasers
S. Juncal, UCSB Office of Technology & Industry Alliances, US
2:35Vacuum Insulation Panels in Stainless Steel Envelope
A. Feinerman, Thermal Conservation Technologies, US
2:42Separation Instrumentation for Biomolecules
M. Knight, CC Biotech LLC, US

NanoFab Symposium

NanoFab 2013 consists of the latest research and development in nanofabrication technologies, devices and applications. The key to realize nanotechnology's potential is still the ability to assemble and manufacture nano-scale devices, structures with dimensions smaller than 100nm. This conference focuses on all areas of nanofabrication that will accelerate nanotechnology's progress: innovative research to state-of-the-art development to cost-effective manufacturability in nanofabrication processes and technologies for current and novel devices and applications, including enabling and differentiating aspects in materials, metrology, characterization, and reliability. The primary focus is on innovative fabrication that significantly advances current application and enables novel nano-application.

The 2013 NanoFab symposium will be integrated with the National Nanotechnology Initiative (NNI) Sustainable Nanomanufacturing Signature Initiative Symposium.

Conference Chairs

Jason Haaheim, NanoInk, Ink.
Guy A. DeRose, California Institute of Technology
Aaron Stein, Brookhaven National Laboratory

Topics & Application Areas

  • Sustainable Nanomanufacturing
  • Novel Material Processes
  • Novel Nanoscale Device Fabrication
  • Advances in Direct-Write Nanoscale Deposition & Patterning
  • Advances in Bottom-Up Approaches to Nano-Composites & Nano-Particles
  • Non-Conventional Nano-Patterning: Top Down/Bottom Up Convergence
  • Harnessing Nanofabrication for Pharmaceutical Applications: biosensors, drug delivery, screening
  • Symbiotic technologies in Nanofabrication & Inspection: patterning, deposition, microscopy & spectroscopy
  • Other

Technical Abstract Submission

Please first review the information for authors as well as the abstract preparation guidelines.


Journal Submissions

Microelectronics Journal

Microelectronics Journal

Published since 1969, Microelectronics Journal is an international forum for the dissemination of research into, and applications of, microelectronics. Papers published in Microelectronics Journal have undergone peer review to ensure originality, relevance and timeliness. The journal thus provides a worldwide, regular and comprehensive update on microelectronics.

For consideration into the Microelectronics Journal please select the “Submit to Microelectronics Journal” button during the on-line submission procedure.


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