Nanotech 2010

Correlation between the oxygen content and the structure of AlCrSiOxN(1-x) thin films deposited by pulsed DC magnetron sputtering

H. Najafi, A. Karimi, M. Morstein
EPFL University, CH

Keywords: oxynitride, pulsed DC sputtering, nanoindentation


Due to their good mechanical properties as well as high temperature oxidation resistance, multi element oxynitride thin films have attracted more attention for applications in cutting and forming tools. Nanocomposite coatings represent a new generation of materials. They are composed of at least two separated phases with a nanocrystalline and/or amorphous structure and New unique physical and functional properties of the nanocomposite coatings are a main driving force stimulating the development of these materials.
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