Direct Printing of Nano-and Microscale Transition Metal Features

A.B. Smetana, J-W Jang, P. Adamczyk, J. Ngunjiri, S. Nettikandan
Nanoink, Inc., US

Keywords: nanolithography, tip based patterning, gold, nickel, iron, cobalt


Our goal was to produce a large scale production method for printing uniform and regular arrays of metal features from 1.5 microns to 25 nm to take these materials out of the lab and into useful devices. Traditionally Cantilever tip based printing is thought to occur by molecular transfer facilitated by a water miniscus that forms between the small space between a sharp tip and a surface in a humid enviroment. Previous work using a similar printing solution was investigated using this method. In our work we use the solution as a viscous polymer that is still in the liquid phase. This method allows us to reload the tips by moving them to a reservoir of the liquid soluion and immediatly resume printing. We can cover much larger areas on a surface this way. Figure 1 shows a section of multiple arrays printed over a square millimeter contianing over 100,000 features in 3 hours. Feature size and morphology was determined by imaging with AFM and SEM instrumentation.