Semiconductor Processing through Aqueous Chemistry

D.A. Keszler, A. Telecky, W. Wang
Oregon State University, US

Keywords: thin film, aqueous process, semiconductor processing


We have developed several new approaches to synthesizing new metal-based aqueous precursors for the deposition and direct patterning of inorganic materials. In this presentation, I will emphasize how this chemistry can contribute to the semiconductor processing at the extreme end of the nanoscale.