Microtech2010 2010

Effect of laser processing parameters and glass type on topology of micro-channels

A. Ben Azouz, D. Brabazon, M. Vázquez, M. Macka
Dublin City University, IE

Keywords: pulsed CO2 laser, micro-fluidics, micro-channel, glasses, chemical detection


Traditional techniques to manufacture micro-fluidic devices are well established but most are limited to surface micro-fabrication. Laser micro-machining provides an alternative technique for micro-fabrication of devices. This paper presents the fabrication of 3-D micro-channel structures with four different types of glass, soda-lime, fused-silica, borosilicate and quartz. Results showed that quartz and fused-silica glasses provided better channel topologies for chemical sensing applications.
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