Multi-cantilever array sensor system with MOEMS read-out

T. Bieniek, P. Janus, W. Majstrzyk, T. Gotszalk, G. Janczyk
Instytut Technologii Elektronowej,

Keywords: Lab4MEMS-II project, MEMS, MOEMS, cantilever beams, multi-cantilever arrays, sensor system


Cantilever beams-based sensor systems become a sensor family applicable in several high-end technology research areas. The outstanding sensitivity and phenomenon selectivity of such systems profits from functionalization technique available for cantilever beams surface. High selectivity of innovative MEMS-sensors has gained the interest of the research and the industrial communities to further exploit and develop subsequent sensors of this type. The optical deflection as the operation principle during the detection process provides a reliable, flexible method for reading information from cantilevers. It results in high sensitivity and reliability of the detection process. Multi-cantilever beam arrays have enormous application potential in medicine, biology or safety making optical detection method less suitable due to their structural complexity. The European Joint Undertaking Lab4MEMS-II project lead authors group to integrate the Micro-Opto-Electro-Mechanical System (abbr. MOEMS) micro-mirrors developed in the frame of the project with dedicated optics, electronics and software. Such an approach resulted in a compact and lightweight system solution combining the advantages of the standard optical readout system with quasi simultaneous multichannel recording from MEMS cantilever arrays multiplied readouts. This paper presents an innovative approach for integration of the MOEMS sensor system embarrassing micro-mirrors, optical elements, dedicated electronics with position sensitive detector (abbr. PSD) to allow large cantilever array the sensing by application of a single laser source and a low-volume, compact PSD. The presented sensor system will also include the dedicated, unique experimental technological line multi-cantilever beams arrays developed by ITE. The light beam from a single laser source follows a dedicated optical path. It is redirected by the attenuated micro-mirror to reach the readout detector module and carry the exclusive information from particular cantilever beams in the sensor array. No additional laser sources are necessary in the presented system. Optical path the size of the position sensitive detector (PSD) is under control and can be limited. The dedicated software in LabView has been developed to control the presented MOEMS detection system. The LabVIEW based operation environment has been developed for testing, programming and controlling all the necessary devices to run measurements and deliver a tool for data processing. The application features allow to run measurements of vibration or deflection characteristics when the cantilevers are excited by an external source (which may be controlled by the application as well). Finally this work will also present representative measurement results from multi-cantilever beam arrays in which several vibrational modes recorded for each cantilever attenuated with Brownian air motion as the only excitation source which cantilever beams were exposed to.