Nanofabrication from Discovery to Production

V. Luciani
National Institute of Standards and Technology, Center for Nanoscale Science and Technology,
United States

Keywords: nanofabrication, user facility, commerce

Summary:

The NIST Center for Nanoscale Science and Technology (CNST) supports the U.S. nanotechnology enterprise from discovery to production. As part of the CNST, the shared-use NanoFab provides its users rapid access to a comprehensive suite of tools and processes for nanoscale fabrication and measurement. The CNST NanoFab at NIST is part of the Department of Commerce and therefore puts a high priority on operating a business friendly, easily accessible facility. The same rates are applied to all users, whether from industry, academia or a CNST colleague down the hall. Applications are accepted at any time and are reviewed and processed every week. Also, NIST does not claim any inherent rights to inventions made in the course of a NanoFab project. The NanoFab features a large, dedicated facility, with tools operated within a class 100, 8,000 square foot (750 m2) cleanroom or in adjacent laboratories that have superior air quality along with temperature humidity, and vibration control. Over 80 major process tools are available, including but not limited to e-beam lithography, 5x reduction stepper photolithography, nano-imprint lithography, laser writing for mask generation, scanning and transmission electron microscopy, metal deposition, plasma etching, chemical vapor deposition, atomic layer deposition, deep silicon etching and ion beam etching. The NanoFab staff consists of scientists, engineers and technicians that specialize in all areas of nanofabrication and provide training and ongoing technical assistance to users. Our goal is to be a catalyst to our user's success and to help nurture nanotechnology commerce in the Unites States. Project applications and instructions are easily available on the web. Users inside NIST and from all around the country are provided on-line access to tool schedules and the tool reservation system. From physicists, engineers and biologists to medical researchers, users find common ground at the nanoscale in the CNST NanoFab.