TechConnect Innovation Program

KrF Laser cristallization of amorphous PZT thin films suitable for CMOS technology.

CDTA, algiers, Algeria

TECHNOLOGY SUMMARY

PZT target elaboration and XRD investigations thin films deposition at room temperatur using RF sputtering magnetron,on different substrats then, post annealing at 650°C in air and XRD, SEM and AFM laser cristallization on amorphous PZT thin films using KrF source of 248nm wavelength at diffrent energies

Primary Application Area: Materials & Chemical

Technology Development Status: Proven Manufacturability

Technology Readiness Level: TRL 3

FIGURES OF MERIT

Value Proposition: integration of exotic materials in CMOS technology

SHOWCASE SUMMARY

Organization Type: Academic/Gov Lab

Showcase Booth #: 28M

Website: http://www.cdta.dz/

GOVT/EXTERNAL FUNDING SOURCES

Government Funding/Support to Date: Corporate

Looking for: Both Funding and Development Partners