TechConnect Innovation Program

High Temperature/Extreme Environment Silicon Carbide MEMS Sensors

Sandia National Laboratories, NM, United States

TECHNOLOGY SUMMARY

Custom piezoelectric MEMS sensors are fabricated on silicon carbide wafers, e.g., for pressure or acceleration. They can withstand temperatures exceeding 600º C. The piezoelectric material is aluminum nitride which is thermally compatible with SiC. The sensor is read out by either direct piezoelectric voltage generation or by resonant frequency changes.

Primary Application Area: Electronics, Sensors & Communications

Technology Development Status: Prototype

Technology Readiness Level: TRL 3

FIGURES OF MERIT

Value Proposition: Conventional silicon based sensors are plumed for liquid cooling to extend the temperature range. This introduces uncertainty as the cooling changes the local environment in which the measurement is made. Liquid cooling also requires significant infrastructure and cost in terms of plumbing.

SHOWCASE SUMMARY

Organization Type: Academic/Gov Lab

Showcase Booth #: 722

Website: www.sandia.gov

GOVT/EXTERNAL FUNDING SOURCES

Government Funding/Support to Date:

Primary Sources of Funding: Other

Looking for: Development / License Partners