TechConnect Innovation Program

Processes enabling low cost graphene/silicon carbide MEMS

Griffith University, Queensland, Australia

TECHNOLOGY SUMMARY

The innovation is a new set of processes for the synthesis of graphene directly onto wafers of Silicon Carbide (SiC) on Silicon (Si) using a mixture of metal catalysts. The technology has enabled the world’s first production transfer-free, patterned graphene devices on silicon on a wafer-scale.

Primary Application Area: Electronics, Sensors & Communications

Technology Development Status: Proven Manufacturability

Technology Readiness Level: TRL 6

FIGURES OF MERIT

Value Proposition: Access to novel material processes that can be used to mass-manufacture a new generation of sensors for a rapidly growing market. The sensors will be biocompatible, chemically resistant and be highly sensitive. Growing the graphene/SiC devices on Si substrates also inherently enables their integration with other silicon technology.

SHOWCASE SUMMARY

Organization Type: Academic/Gov Lab

Global Innovation Awardee

Showcase Booth #: 606

Website: www.griffith.edu.au/science-aviation/queensland-micro-nanotechnology-centre

GOVT/EXTERNAL FUNDING SOURCES

Government Funding/Support to Date: Australian Research Council (ARC) – Future Fellowship
Australian National Fabrication Facility (ANFF)

Primary Sources of Funding: Federal Grant, University

Looking for: Both Funding and Development Partners