TechConnect Innovation Program

Low-cost batch fabrication of high aspect ratio AFM tips

University of Waterloo - WatCo, Ontario, Canada

TECHNOLOGY SUMMARY

This technology is a fabrication process for high aspect ratio Atomic force microscope (AFM) tips. The key feature is that it is a low-cost batch fabrication process with potentially high yield. The process starts from a regular pyramid-shaped tips wafer, process them simultaneously to produce high aspect ratio tips.

Primary Application Area: Instrumentation & Manufacturing

Technology Development Status: Proven Manufacturability

Technology Readiness Level: TRL 7

FIGURES OF MERIT

Value Proposition: Our technology utilizes a batch process where the entire wafer of tips is processed at the same time. This implies a very low cost for our process. Therefore, the potential profit margin is rather high for our technology.

SHOWCASE SUMMARY

Organization Type: Academic/Gov Lab

Showcase Booth #: 940

Website: www.uwaterloo.ca

GOVT/EXTERNAL FUNDING SOURCES

Government Funding/Support to Date: The technology is awarded for the Canada NSERC Idea to Innovation grant Phase I. $125,000 for one year to develop the product prototype, which include 90% product development expense and 10% IP protection and market outreach expense.

Primary Sources of Funding: Federal Grant, University

Looking for: Both Funding and Development Partners