Processes enabling low cost graphene/silicon carbide MEMS
Griffith University, Queensland, Australia
The innovation is a new set of processes for the synthesis of graphene directly onto wafers of Silicon Carbide (SiC) on Silicon (Si) using a mixture of metal catalysts. The technology has enabled the world’s first production transfer-free, patterned graphene devices on silicon on a wafer-scale.
Primary Application Area: Electronics, Sensors & Communications
Technology Development Status: Proven Manufacturability
Technology Readiness Level: TRL 6
FIGURES OF MERIT
Value Proposition: Access to novel material processes that can be used to mass-manufacture a new generation of sensors for a rapidly growing market. The sensors will be biocompatible, chemically resistant and be highly sensitive. Growing the graphene/SiC devices on Si substrates also inherently enables their integration with other silicon technology.
Organization Type: Academic/Gov Lab
Showcase Booth #: 606
GOVT/EXTERNAL FUNDING SOURCES
Government Funding/Support to Date: Australian Research Council (ARC) – Future Fellowship
Primary Sources of Funding: Federal Grant, University
Looking for: Both Funding and Development Partners