Multi-functional Nanomaterials for Green Nanoelectronic Manufacturing

Qinghuang Lin

Qinghuang Lin

Research Staff Member and Manager

IBM T. J. Watson Research Center

Dr. Qinghuang Lin is a Research Staff Member, a manager and an IBM Master Inventor at the IBM T.J. Watson Research Center in Yorktown Heights, New York. For more than15 years, Dr. Lin has held a variety of research and engineering positions in advanced lithography, photoresist materials, dielectric materials, semiconductor BEOL integration, 3D chip integration for 0.25 um to 10 nm nodes of CMOS logic technologies, DRAM technologies as well as other exploratory research, including DNA sequencing, novel memories and quantum computing at IBM. A frequent organizer and speaker of professional conferences at ACS, MRS, SPIE and SEMI, Dr. Lin is the editor or co-editor of 2 books and 6 conference proceedings volumes and the author and co-author of over 60 technical papers. He holds more than 50 issued US patents and has approximately 50 pending US patents. He has received 22 IBM Invention Plateau Achievement Awards. He was named an IBM Master Inventor in 2011. In 2002, Dr. Lin was a co-recipient of an IBM Research Division Award for \\\"invention, development and implementation of 248 nm bilayer resist technology in manufacturing.\\\" This IBM 248 nm bilayer resist technology was part of the 40 years of innovations in semiconductor technology that won IBM 2004 US National Medal of Technology.

Dr. Qinghuang Lin serves as an associate editor of Journal of Micro/Nanolithography, MEMS and MOEMS (JM3). He is the Secretary of the American Chemical Society: Polymeric Materials Science and Engineering (ACS PMSE) division. He also served on the Electorate Nominating Committee, Industrial Science and Technology Section of the American Association for the Advancement of Science (AAAS), the Executive Committee of the ACS PMSE division and Co-chair of the PMSE Fellows Selection Committee. In addition, Dr. Lin is a member of two engineering honor societies: Tau Beta Pi and Alpha Sigma Mu.

Dr. Qinghuang Lin received his B.E. and M.S. degrees from Tsinghua University, Beijing, China and his Ph.D. degree from the University of Michigan, Ann Arbor, Michigan, USA. He was a post-doctoral fellow at the University of Texas at Austin prior to joining IBM. He also completed a MicroMBA Program at IBM Watson Research Center.