Nano Particles formation on powder(NPP) Substrate in Physical Vapor Deposition

S-K Koh, C. Lee, J.H. Lee, B.K. Kang, H. Kaji, M. Hayashi
GL Materials, Inc., KR

Keywords: nano-particle, physical vapor deposition, nuclei, substrate, dispersion


Nano-sized (2~10 nm) metal particles were formed and accumulated on the rotating powders or chips substrate by conventional physical vapor deposition (PVD) process. The powders such as glucose, sucrose, NaCl, Na2CO3, polyethylene terephthalate (PET), etc. were selected for nano-particles on powder (NPP) process. The nuclei did not grow up to coalescence stage and did not agglomerate each other when the powder in the vessel was continuously circulated during the deposition. Nanoparticles formation mechanism on the rotating powder are explained in terms of nucleation mode on a static thin film deposition and on a periodic deposition with various interval of deposition and non-deposition. Formation and accumulation mechanism, shape, characteristics, etc. of nano-particles on the carrier powder during NPP process have been explained in terms of thermodynamics with various spectroscopy, etc. comparing with conventional thin film growth in PVD. Advantages such as easy addition of nanoparticles into polar or non-polar products, antibacterial fiber for textile by nano-composites (Ag/PTFE, Ag/PET, etc.), natural silk fiber with Ag nanoparticles (20~300 ppm) from cocoon, nano-particle loading process in porous active carbon or ceramic supporters, etc. due to the non-necessity of dispersion agent have been discussed with real field data. .