Optimization of a Poly-SiGe MEMS Xylophone Bar Magnetometer based on its equivalent circuit

V. Rochus, M. Farghaly, X. Rottenberg, H.A.C. Tilmans
imec, BE

Keywords: magnetometer, resonator, equivalent model, optimization

Summary:

This paper presents the optimization of a poly-SiGe-based MEMS Xylophone Bar Magnetometer (XBM) using a novel characterization method based on the measurement of the forward/backward transmission gains S21/S12 of the XBM treated as a two-port network. More specifically, the optimization is performed thanks to an equivalent circuit that models the electro-magneto-mechanical behavior of the magnetometer.