CMOS-Compatible Thermally Actuated MEMS Viscosity Sensor with Aluminum on Silicon Membrane

I. Puchades, L.F. Fuller, S.E. Lyshevski
Rochester Institute of Technology, US

Keywords: MEMS, sensors, silicon


This paper presents viscosity measurements performed on standard commercially-calibrated oils as well as to motor oils measured on a commercial cone-and-plate viscometer. Figure 2 shows the response of the sensor, in the frequency domain, when measuring the fluid viscosity. The experimentally obtained data is compared to theoretical predictions as shown in Figure 3. Frequency correlation to viscosity was shown to be the best indicator for the range of viscosities tested with lower error (~ 5%), than that of quality factor (~ 20%). Multimedia material of results will be made available at