MEMS-based deformable mirrors and spatial light modulators

T. Bifano
Boston Micromachines Corporation, US

Keywords: photonic materials, lasers

Summary:

Microscale deformable mirrors (DMs) have enabled rapid advances in applications ranging from large telescope astronomy and laser communication to biological microscopy and retinal imaging. In this talk I describe our efforts at Boston University and at Boston Micromachines Corporation to design, fabricate, and control MOEMS DMs for adaptive optics (AO) applications. Integration of the DMs in AO systems is described, along with results demonstrating unprecedented improvements in microscope and telescope imaging. MEMS DM research offers the opportunity to invent and develop technology that is critically needed for high-resolution imaging.