Precision Micro-Optical Elements for Manufacturing of Gas Sensors using IR-Absorption

H.-J. Quenzer, J. Janes, V. Stenchly, S. Schwarzelbach, B. Wagner, R. Dudde
Fraunhofer Inst. Silicon Technology, DE

Keywords: MEMS, MOEMS, production micro devices, CO2 Sensor

Summary:

A new process technology has been developed by Fraunhofer Institute Silicon Technology for manufacturing precise optical components from borosilicate glass by eight inch wafer batch processing. Glass forms are produced by a contact-less glass flow process leading to excellent surface qualities with surface roughness in the nanometer range. An improved process technology was applied for the first time for manufacturing of precise spherical mirrors of up to 8mm diameter. The mirrors are assembled to realize a multiple reflection cell with low outer volume and a large internal optical absorption path. These cells will be used as IR-absorption gas sensors. Processing capabilities and optical parameters achieved are presented.