Roll-to-Roll (R2R) ALD Thin Film Coatings at Atmospheric Pressure

M. Groner, J. Spencer, K. Buechler
ALD NanoSolutions, US

Keywords: R2R, roll-to-roll, ALD, continuous, barrier, web, thin film


Thin films deposited by atomic layer deposition (ALD) are marked by their excellent conformality, uniformity, and pinhole free nature. ALD films may be deposited on polymer substrates and show great promise for flexible electronics, packaging, and battery applications. However, conventional ALD batch reactor processing is not considered promising for scaling up the ALD process for these industries. The manufacturability of ALD coatings on polymer web substrates requires the development of cost effective Roll-to-Roll (R2R) ALD processing. We have developed a continuous ALD web coating system that demonstrates the feasibility of atmospheric pressure R2R ALD. The reduced capital costs of atmospheric pressure R2R systems enable a broad range of commercial applications, from flexible PV and OLEDs to low cost food and drug packaging.