Dynamics of carbon nanopillar growth on bulk and thin substrates irradiated by a focused electron beam

G.S. Zhdanov, A.D. Manukhova, M.S. Lozhkin
St. Petersburg State University, RU

Keywords: EBID, carbon nanopillars


Here we compare successive stages of carbon nanopillar growth on various substrates irradiated by a 20keV electron beam focused to a spot of 1 nm diameter. The hydrocarbon molecules present in the residual atmosphere of a scanning electron microscope chamber or evaporated from an auxiliary source placed at the specimen stage were used as precursors. The minimum curvature radius measured on tips grown under normal incidence is about 10 nm and seems to be independent of the cone angle. This value is close to the reported data obtained with other instruments by vertical growth and coincides with expected spatial range of secondary electrons. Using grazing incidence may be preferential for fabrication of sharper tips.