Web-based MEMS Design, Modeling, and Simulation

J.V. Clark
Purdue University, US

Keywords: MEMS

Summary:

Dr. Clark discusses the first publicly-available online tool for the design, modeling, and simulation of MEMS. Unique advances include novice-friendly use, design optimization for reducing performance variation caused by process variation, parametric exploration of ready-made systems, automated GDSII layout arrays, compact modeling of CNTs, design by genetic programming, and self-calibratable devices.