High-rate Nanoscale Offset Printing Process Using Reusable Damascene Templates

H. Cho, J. Seo, J. Lee, S. Somu, A. Busnaina
Center for High-rate Nanomanufacturing, US

Keywords: offset printing, Damascene templates, electrophoresis, imprint transfer


we introduce a multi-scale offset printing process based on directed assembly and a transfer. A reusable damascene template is specifically created for high-yield and high-rate assembly and transfer of nanoelements. The template can be fabricated using hard substrates, such as silicon wafer, or flexible substrates, such as polyimide or PET, thereby enabling continuous manufacturing systems, such as a roll-to-roll system. Electrophoresis is used to assemble various nanoelements such as polymer nanoparticles, silica nanoparticles, carbon nanotubes (single and multi-wall) or organic molecules. It is done with very high degree of control, and transfer printing is used to transfer the assembled nanoelements to a recipient substrate. Furthermore, to ensure uniformity during assembly the reusable templates are designed so that all micro/nano conductive patterns have same electrical potential during the electrophoresis assembly stage. By controlling assembly parameters, such the applied voltage and pulling speed, we show that control over the thickness and alignment of nanoelements, especially SWNTs can be achieved. Using the transfer printing process we demonstrate 100% transfer yield. The template can be reused for more than hundred assembly and transfer cycles without the need for any additional process.