Non-contact biaxial nanoprobe utilized for surface measurements of MEMS

B. Goj, L. Dressler, M. Hoffmann
Ilmenau University of Technology, DE

Keywords: biaxial nanoprobe, non-contact, electrostatic actuator, silicon micromachining


In this work an oscillating biaxial nanoprobe will be presented which measures the surface of a measurement object. The biaxial nanoprobe vibrates in two directions to realize scanning measurements and to overcome the challenges of sticking. Two electrostatic actuators drive the nanoprobe in x- and y-direction and two electrostatic sensors measure the position of the probe. If the touching element of the biaxial nanoprobe is close enough to the measurement object (≤ 1 µm) the oscillations are damped because of the squeeze film damping between the measurement object and the spherical touching element. A contact model for the oscillating nanoprobe will be presented. Therewith, the influences of the measurement environment to the behaviour of the nanoprobe will be discussed.