CANCELED - Numerical modeling of squeeze-film damping in micro-mirrors including rarefaction effects

S. Nigro, L. Pagnotta, M.-F. Pantano
Università della Calabria, IT

Keywords: squeeze-film damping, MEMS, FEM

Summary:

In this work, we use a commercial finite element software, Comsol Multiphsics to solve some squeeze-film damping problems, which were experimentally investigated in the literature. They involve rotational motion at both high and low pressure regime. Finally, we discuss our results, which show good agreement with the corresponding experimental data.