A Liquid Crystal Polymer (LCP) Membrane MEMS Sensor for Flow Rate and Flow Direction Sensing, Medical and Environmental Applications

Organization: 

National University Singapore, Singapore, SG

I.P. Brief: 

LCP has been used in the past mainly for electronic packaging applications.In this work, the inventors used LCP as a structural material. LCP material offer much higher sensitivity over silicon as a structural material for flow sensing due to its much lower Young's modulus without compromising the sensor reponse.

Keywords: 

Flow direction sensing, flow rate, human breath monitoring

Primary Industry: 

Medical, Pharmaceuticals, Personal Care

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