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Increased Sensitivity of Carbon Nanotube Sensors by Forming Stable and Low Resistance CNT/metal Electrode

D. Jeon, D. Park, S. Lee
Seoul National University, KR

Keywords: carbon nanotube, contact, contact resistance, eutectic alloy


We fabricated a rigid and low resistance contact for CNT by utilizing a eutectic mixture melting at low temperature as an electrode. The fabrication was done by depositing a eutectic Au/Al thin film on the SiO2/Si substrate and patterning the film to form an electrode. After depositing CNT to bridge two electrodes by using dielectric electrophoresis, we annealed the substrate in air at the Au-Al eutectic melting temperature of 250 °C. As a result, Au-Al alloy grains formed under which CNT was embedded and pinched. The embedded CNT contact was as strong as to tolerate the ultrasonic agitation for 90 s and the current-voltage measurement indicated that the contact resistance was lowered by a factor of 4. By performing standard fabrication process on this CNT-deposited substrate to add another pair of electrodes bridged by CNT in perpendicular direction, we could fabricate a CNT cross junction. Finally, we could conclude that the eutectic alloy electrode is valid for CNT sensors by examine the detection of Au ion which is spontaneously reduced to CNT surface. The device sustatined strong washing process and maintained its detection ability
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