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Laser Postionization Secondary Neutral Mass Spectrometry for Analysis on the Nanometer-Scale – the Followup

I.V. Veryovkin, S.V. Baryshev, A.V. Zinovev, C.E. Tripa, Q. Peng, J.W. Elam, M.J. Pellin
Argonne National Laboratory, US

Keywords: three dimensional mass spectrometry, depth resolution, lateral resolution

Abstract:

Depth resolution on the order of a few atomic layers has been demonstrated by initial tests of the dual beam sputter depth profiling with the SARISA laser post-ionization secondary neutral mass spectrometry instrument, which was applied to characterize a stack of 16 alternating MgO/ZnO layers grown by atomic layer deposition on Si substrate. At the conference, these results will be presented together with results of lateral resolution tests, currently under way, and discussed in view of three-dimensional mass spectrometry on nanometer scale.
 
 
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