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Novel Low Temperature Fabrication Method for Label-Free Electronic Sensing of Biomolecules in Nanofluidic Channels with Integrated Electrodes

T. Wynne, X.T. Huang, S. Pennathur
University of California, Santa Barbara, US

Keywords: nanofluidics, nanochannel


In this work, we demonstrate a surface micromachined fabrication approach for integrated addressable metal electrodes within centimeter-long nanofluidic channels using a low-temperature, xenon diflouride dry-release method for novel biosensing applications. The main contribution of this fabrication process involves the addition of addressable electrodes to a novel dry-release channel fabrication method, produced at <300°C, to be used in nanofluidic electronic sensing of biomolecules. Nanofluidic technology is known to be gaining major popularity in the field due to the unique coupled physics and phenomena that occur at that length scale. Recently there has been a push for electronic detection which does not require invasive, time-consuming fluorescent labeling. In addition, label-free electronic detection is a major step toward truly handheld devices for biological and chemical sensing due to its inherent CMOS compatibility. Therefore, the fabrication of nanofluidic devices with integrated addressable electrodes will enable a new platform for hand-held diagnostics as well as advances in native biomolecule characterization.
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