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Method Of Applying A Lubricant To A Micromechanical Device

Organization:National University of Singapore, National University of Singapore, SG
I.P. Brief:This IP relates to the invention that addresses a process of reducing the friction, adhesion and wear between side walls of a MEMS device upon contact (or any contacting surfaces) by localized application of a nanolubricant at the point of contact (minimizing the adsorption at unwanted regions of the device).
Keywords:MEMS, Actuators, Micro motors, Micro engines, Tribology, Friction, Stiction, Adhesion, Wear, Lubrication
Primary Industry:Sensors & Microsystems

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