|Executive Summary:||The MEMS Foundry Itzehoe GmbH (MFI) is focusing on MEMS production services and acts as a customer oriented contract manufacturer. Customer specific MEMS devices like micro sensors, actors, micro optical structures, functional cap wafers and hermetic wafer level packaging processes can be offered in high volume.
MFI was established in 2009 as a spin-off from the Fraunhofer Institute for Silicon Technology (ISIT) and is located within the same wafer fabrication facility in Itzehoe/Germany. The founder of MFI, Dr. Peter Merz, has been working for Fraunhofer for more than 10 years within the project management for the development and industrialisation of MEMS products like sensors, through-silicon vias or micro optical components. He was technical leader for the ISIT / SensorDynamics joint development of the MEMS process platform PSM-X2 (Polysilicon Surface Micromachining process platform for vacuum-packaged sensors) which succeeded to bring the first inertial MEMS combi sensor on the market.|