TechConnect Summit 2010

HIGH-RESOLUTION MICROSCOPY AND PHOTOLITHOGRAPHY DEVICES USING FOCUSING MICROMIRRORS (PCT/IB2010/050300)

Organization:Ecole Polytechnique de Lausanne (EPFL), VD, CH
I.P. Brief:Our technique aims at replacing lens systems when the limited field of view is an issue, for applications requiring high numerical aperture optics. The invention relates to large-field high-resolution microscopy and photolithography setups operating with polychromatic light. It includes the use of a plurality of focusing micro-mirrors.
Keywords:microarray scanner, confocal microscopy, fluorescence, focusing micro-mirror, parallel detection, high NA, micro-patterning, photolithography
Primary Industry:Sensors & Microsystems

Full IP Descriptions available on-site.


 
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