TechConnect World 2017
National SBIR/STTR Conference National Innovation Summit & Showcase Nanotech 2016
Nanotech 2017
 

MEMS & NEMS Devices, Modeling & Applications

MEMS & NEMS Devices, Modeling & Applications

Submit Poster Abstract - due March 31

Please first review the information for authors — abstract submission guidelines.

Symposium Chair

William (Cy) Wilson William (Cy) Wilson
Electronics Engineer, NASA Langley Research Center

Key Speakers

Ronald A. CoutuOverview of Microelectronics and MEMS research at the Air Force Institute of Technology
Ronald A. Coutu
Professor and V. Clayton Lafferty Endowed Chair, Marquette University Adjunct Professor, Air Force Institute of Technology, Wright-Patterson Air Force Base

Wayne HiebertOptomechanics and the Impending Nanosensor Revolution
Wayne Hiebert
Group Leader and Program Coordinator – Nanoenabled Sensors, National Institute for Nanotechnology (NINT), Canada

Sarah BergbreiterMicrorobotics
Sarah Bergbreiter
Director, Maryland Robotics Center


Symposium Sessions

Monday May 15

10:30MEMS & NEMS Devices, Modeling & Applications
1:30MEMS & NEMS Devices, Modeling & Applications II

Tuesday May 16

10:30Micro & Bio Fluidics
10:30Electronics Innovation Spotlights: Panasonic, LG, Energizer
10:30Aerospace/Defense Innovation Spotlights: Aerojet, Sikorsky/Lockheed Martin, Boeing
1:30Chemical & Physical Sensors
MEMS & NEMS: Posters

Wednesday May 17

8:30Biosensors I
8:30Biotech Innovation Spotlights: Baxter, DOD Medical
10:30Biosensors II
1:30Nanoelectronic Devices
Sensors - Chemical, Physical & Bio: Posters
Advanced, Printed & Flexible Electronics: Posters

Symposium Program

Monday May 15

10:30MEMS & NEMS Devices, Modeling & Applications
10:30Overview of Microelectronics and MEMS research at the Air Force Institute of Technology (invited presentation)
R. Coutu, Wright-Patterson Air Force Base, US
10:55Design considerations: From Micro-Opto-Mechanical Pressure Sensor (MOMPS) to Micro-Opto-Mechanical Microphones (MOMM)
R. Haouari, R. Jansens, V. Rochus, B. Figeys, X. Rottenberg, Imec (Belgium) ; KU Leuven (Belgium), BE
11:15Computational Analysis of Electrical Stimulation Devices to Promote Wound Healing
A. Anand, K. Liu, V. Sukhotskiy, A. Verma, J. Fournier, G. Gellman, W. Bacon, E.P. Furlani, University at Buffalo, US
11:35An analytical model using order reduction method for out-of-plane electrostatic sound energy harvesters
J. Li, C. Xu, L. Zhang, G. James, J. Tichy, D.-A. Borca-Tasciuc, Rensselaer Polytechnic Institute, US
11:55The development of acoustic levitation for time resolved protein crystallography experiments at XFELS
P. Docker, R. Morris, M. Newton, J. Kay, J. Beale, D. Axford, A. Orville, D. Stuart, Diamond light Source, UK
12:15QUARTZ MEMS OSCILLATORS FOR HIGH-PERFORMANCE NAVIGATION AND WIRELESS COMMUNICATION SYSTEMS
D.T. Chang, Y. Yoon, H.P. Moyer, H.D. Nguyen, HRL Laboratories, LLC, US
1:30MEMS & NEMS Devices, Modeling & Applications II
1:30Microrobotics (invited presentation)
S. Bergbreiter, Maryland Robotics Center, US
1:55Optomechanics and the Impending Nanosensor Revolution (invited presentation)
W. Hiebert, National Institute for Nanotechnology, CA
2:20Piezoelectric actuators, next driver for MEMS market?
S. Fanget, F. Casset, S. Nicolas, C. Dieppedale, M. Allain, B. Desloges, G. Le Rhun, CEA - LETI, FR
2:40Modeling the effect of the increase in the actuation voltage on the dynamic behavior of a RF MEMS switch
M. Jamshidzadeh-Jasmina Casals, University of Brcelona, US
3:00Packaging of MEMS: some thermodynamic and kinetic issues during eutectic bonding in the framework of the miniaturization trend
F. Hodaj, Grenoble Institute of Technology, FR
3:20Meshed Photonic Crystal for Micro/Nano Gap Control for Near-field Thermal Modulators Applications
M. Elzouka, S. Ndao, University of Nebraska - Lincoln, US
3:40Wafer level integration of epitaxial piezoelectric thin films for novel NEMS, MEMS and MOEMS applications
M. Dekkers, Solmates BV, NL
4:00MEMS Inertial Sensors for Cyber-Physical Systems: Trustworthy Sensing, Secure Communication, Data Fusion and Information Control
L. Herlihy and S.E. Lyshevski, Rochester Institute of Technology, US

Tuesday May 16

10:30Micro & Bio Fluidics
10:30Next generation microfluidic cell stretcher for breast cancer mechanotyping (invited presentation)
Y. Deng, A.J. Chung, Rensselaer Polytechnic Institute, US
10:55On the use of polymeric additives to promote plasma separation from whole blood in open microchannels
E. Lee, J. Berthier, P. Laurent, F. Navarro, M. Cubizolles, CEA, FR
11:15Microfluidic 3D Capillary Network Test Phantom for Subdermal Vascular Imaging
P. Schneider, B. Bosinski, A. Trimper, K.W. Oh, University at Buffalo's Sensors & MicroActuators Learning Lab (SMALL), US
11:35PuLMo: Towards a User Defined Integrated and Configurable Human Lung Micro-Physiological System
P. Nath, J-H Huang, A. Arefin, J.F. Harris, K. Balatsky, Y. Shou, D. Platts, H. Sandin, S. Iyer, R. Iyer, Los Alamos National Laboratory, US
11:55Real-time bacterial capture and sorting using dielectrophoresis and electroosmosis
S.X. Simon, H. Markewich, E. Mallick, M. Weber, Fluid-Screen, Inc., US
10:30Electronics Innovation Spotlights: Panasonic, LG, Energizer
10:30Aerospace/Defense Innovation Spotlights: Aerojet, Sikorsky/Lockheed Martin, Boeing
1:30Chemical & Physical Sensors
1:30Damage Detection Sensor System for Aerospace and Multiple Applications
M. Williams, M. Lewis, T. Gibson, J. Lane, C. Ihlefeld, National Aeronautics and Space Adminstration, US
1:50Self-Sustained Infrared Temperature Sensor Arrays
R. Mittmann Reis and S.E. Lyshevsk, Rochester Institute of Technology, US
2:10Evaluation of In2O3 prepared by the delayed ignition combustion process as a gas sensor
K. Lionti, A. Fasoli, L. Sundberg, F. Ceccarelli, R.D. Miller, L. Bozano, IBM Research - Almaden, US
2:30A New Gas/Supercritical Fluid (SCF) Diffusivity and Solubility Measurement Method for CO2 Saturated Polymer Systems Using Optical Transmission Property
S.X. Yao, J. Lee, J.K. Lee, M.B.G. Jun, P.C. Lee, University of Vermont, US
2:50Zinc Oxide optical and chemical sensors fabricated by Ink Jet printing and drop casting
D.J. Ewing, M. Casper, A. Stramel, B. Morick, B. Cook, J. Wu, The Department of Energy's Kansas City National Security Campus, US
3:10Alcohol conent measuring system based in interstitial fluid extraction and SAW sensors
A. Gnadinger, P. Gnadinger, COGNA Scientific LLC, US
3:30Sensing Solution for Airborne Carbon Nanotube Exposure in Workplaces Based on Surface-Enhanced Raman Spectroscopy
R. Bieri, J. Borek-Donten, B. Celikkol Zijlstra, S. Cattaneo, T. Bürgi, Stat Peel, CH
3:50Tunable Conductive Nanomesh-based Pressure Sensors with High Sensitivity and Wide Operation Range for Wearable Health Monitoring Applications
H. Chang, S. Kim, S. Jin, S-W Lee, K-Y Lee, H. Yi, Korea Institute of Science and Technology, KR
MEMS & NEMS: PostersExpo Hall D & E
Modeling and Numerical Simulation of a Large-Displacement Low-Voltage New Micro-Actuator
W. Tian, H. Cui, J. Shi, Xidian Univeristy, CN
A new humidity sensor based on the effect of water content on a capacitive MEMS oscillator’s thermo-electrical characteristics
F. Alsaleem, University of Nebraska–Lincoln, US
MOF Coated Resonator Operated in Air for Combined Gas Sensing and Switching
N. Jaber, S. Ilyas, O. Shekhah, M. Eddaoudi, M.I. Younis, King Abdullah University of Science and Technology, SA
High Sensitivity MEMS Pressure Sensor
M. Juetten, Iowa State University Research Foundation, US
Scalable Pressure Sensor Based on Electrothermally Operated Resonator
Az. Hajjaj, M. Hafiz, N. Alcheikh, MI. Younis, King Abdullah University of Science and Technology (KAUST), SA
A New Pressure Threshold Sensor Based on Nonlinear MEMS Oscillator
F. Alsaleem, M.H. Hasan, University of Nebraska - Lincoln, US
Modeling and Simulation on Crossroad-Type Graphene-Resonator Accelerometer
O.K. Kwon, J.W. Kang, Korea National University of Transportation, KR
Multi-cantilever array sensor system with MOEMS read-out
T. Bieniek, Instytut Technologii Elektronowej, PL
A New Concept for Humidity Sensing Using Curved Micro-beams
H.M. Ouakad, M.H. Hasan, F.M. Alsaleem, University of Nebraska - Lincoln, US
Modeling and simulation of organic MEM relay for estimating the coefficient of thermal expansion of PEDOT:PSS
N.Z. Khan, Rutgers University, US
Measuring Electrical Resistance of WSi Connections on Micro-scale under Mechanical Stress Using Thermal and Mechanical Properties through Finite Element Method
M.J. Sharifi, A.H. Khoogar AND.M. Tajdari, MUT university, IR
Learning MEMS Design, Simulation and Fabrication Through 3-D Printing
R. Dahle, R. Rasel, SUNY New Paltz, US

Wednesday May 17

8:30Biosensors I
8:30Cellular design principles for biomimetic approaches to next generation biosensors (invited presentation)
J. Rickus, Purdue University, US
8:55DNA Nanotechnology; A platform for sensing
S. Buckhout-White, M.G. Ancona, E.R. Goldman, I.L. Medintz, Naval Research Laboratory, US
9:15Development of a time-correlated single-photon counting (TCSPC) Raman spectrosensing platform for early diagnosis of neurodegeneration diseases
J. Wang, M.H. Greenlee, C. Yu, Iowa State University, US
9:35Fluorescence blinking as an output signal for programmable biosensing
M. Jones, K. Afonin, University of North Carolina at Charlotte, US
9:55A Noninvasive Fluorescent Biosensor for Transdermal Glucose
L. Tolosa, S. Brown, C. Tiangco, E. Corson, University of Maryland Baltimore County, US
8:30Biotech Innovation Spotlights: Baxter, DOD Medical
10:30Biosensors II
10:30Surface Functional Poly(lactic Acid) Electrospun Nanofibers for Biosensor Applications
M.W. Frey, E. Gonzalez, L. Shepherd, Cornell Universty, US
10:50Stimulus-Response Biosensor for Determining Bacteria Viability Using Lectin-Glycoenzyme Nanobrushes
E.S. McLamore, I. Khondaker, C. Gomes, D. Alves De Oliveira, University of Florida, US
11:10Label-free, rapid Listeria monocytogenes biosensor based on a stimulus response nanobrush and nanometal hybrid electrode
S. Althawab, D.A. Oliveira, C. Smith, E.S. McLamore, C. Gomes, Texas A&M University, US
11:30Fiber-optic sensor for bacteria detection based on intensity-modulated SPR by monochromatic excitation
A. da Silva Arcas, F. da Silva Dutra, R.C.S. Barros Allil, M.M. Werneck, Federal University of Rio de Janeiro, BR
1:30Nanoelectronic Devices
1:30TBA (invited presentation)
O. Brand, Georgia Institute of Technology, US
1:55TBA (invited presentation)
J. Spanier, Drexel University, US
2:20Feedback Process Control for Nano-manufacturing of Semi-conductor Circuits
W. Kohn, Z.B. Zabinsky, Atigeo, LLC and CUNY Graduate Center, Computer Science Department, US
2:40Aberration-corrected Electron Beam Lithography at the One Nanometer Length Scale
A. Stein, V.R. Manfrinato, L. Zhang, C.-Y. Nam, E.A. Stach, C.T. Black, Brookhaven National Laboratory, US
3:00Controlling the Interface-Size of Inorganic/Organic Semiconductors Heterojunction Nanowires for Perfect Performance Diodes
H. Liu, Y. Li, Y. Li, Chinese Academy of Sciences, CN
3:20Spintronics: Recent developments on ultra-low-energy, area-efficient, and fast spin-devices and spin-circuits
K. Roy, Purdue University, US
3:40High density multifunctional neural probes for parallel read-out and control
V. Lanzio, M. West, S. Sassolini, S. Dhuey, A. Koshelev, H. Adesnik, G. Telian, R. Witharm, P. Denes, F. Martinez Mc-kinney, S. Ito, S. Cabrini, Lawrence Berkeley National Laboratory, US
Sensors - Chemical, Physical & Bio: PostersPotomac Registration Hall
Surface Strain Effects on the Adsorption of CO gas on Titanium Oxide Tubes
BJ. Song, S. Hyun, Y. Park, M. Chun, J-in Im, Z-ho Choi, BD. Yu, T. Sekino, Korea Institute of Ceramic Engineering & Technology, KR
The Sensitive Element of Cholesterol Optical Sensor
M. Vistak, V. Dmytrach, Z. Mykytyuk, V. Petryshak, L. Kobylinska, Danylo Halytsky Lviv National Medical University, UA
Visible Light Absorbing Photoremovable Protecting Groups
M. Juetten, Iowa State University Research Foundation, US
Comparative study of chemo-bio synthesized MgO nano particles for LPG sensing
S. Goutham, D.S. Kumar, K.V. Rao, JNT UNiversity Hyderabad, IN
Triggering and focusing bacterial quorum sensing signal by nano-magnetic assembly
Q. Wang, Y. Guan, W. Bentley, G. Payne, C-Y Tsao, D.N. Quan, Y. Li, B. Zhang, L. Mei, University of Maryland, US
Using Gold Nanorod Arrays and Cellulose Nanocomposite as SERS Substrates for Detection of Pesticide Residues in Foods
M. Lin, F. Alsammarraie, P. Liou, University of Missouri, US
CVD Graphene-Based Backgate Sensor for Online Scale Monitoring System
H. Younes, A. Al Ghaferi, I. Saadat, Masdar Institute of Science and Technology, AE
Linear-Logarithmic Two-Transistor Active Pixel Sensor with Wide Dynamic Range
S-H Jo, M. Bae, B-S Choi, P. Choi, J-K Shin, Kyungpook National University, KR
Biosensor prototype based on carbon nanotubes for the RF-detection and NIR-treatment of HeLa cells
G. Caro, K. García, J. Avalos, G. Morell, University of Puerto Rico, US
A model for an Optical Ring Microresonator towards Nanoparticle Detection
F. Ahmeti, K. Teker, Istanbul Sehir University, TR
Analysis of Ion-Sensitive Tunnel Field-Effect Transistor (IS-TFET) as pH sensor
A. Ajay, R. Narang, M. Saxena, M. Gupta, University of Delhi, IN
Rapid Detection of Drugs-of-abuse in Urine and Oral Fluid by Mass Spectrometry
T-T Ng, B. Hu, P-K So, Z. Yao, The Hong Kong Polytechnic University, HK
A NANOeSPRi-based IVD Assay for Multiple Organ Injury
D. Patel, J. Obliosca, G. Zhang, Z. Zhou, Luna Innovations Inc., US
Discharge Region Sensing Technology of High Voltage Equipment Based on The Testing of The Corona Radiation Field
W. Chuang, C. Xi, S. Geng-chen, T. Kai, Beijing Institute of Technology, CN
Organic Nanobiomimetic Memristor/Memcapacitor Devices Ultrasensitive Direct Detect Matrix Matelloproteinase-2 in Human Serum
E.T. Chen, J. Thornton, S-H. Duh and P.T. Kissinger, Advanced Biomimetic Sensors, US
Material Identification Based on Electrostatic Sensing Technology
K. Liu, X. Chen, P-F Li, L-C Zhu, Beijing Institute of Technology, CN
Voluntary Intention Driven Hybrid Functional Electrical Stimulation (FES)-robotic Exoskeleton for Coordinated Upper Limb Rehabilitation after Stroke
X. Hu, H. Wai, J. Hu, X. Zheng, The Hong Kong Polytechnic University, HK
Gait Analysis and Classification of Restricted Knee
K. Tang, Xi Chen, W. Wang, J. Yu, Beijing Institute of Technology, CN
Advanced, Printed & Flexible Electronics: PostersPotomac Registration Hall
Simulation and Analytical Model to study the impact of Gate Misalignment in p-n-i-n Tunnel FET
U. Upasana, S. Gupta, R. Narang, M. Saxena, M. Gupta, University of Delhi, IN
Characteristic Fluctuation of Gate-All-Around Silicon Nanowire MOSFETs Induced by Random Discrete Dopants from Source/Drain Extensions
W-L. Sung and Y. Li, National Chiao Tung University, TW
Three Operation Modes of 6T-SRAM Using 5nm-Node Multi-Vt FD-SOI MOSFETs
J-Y. Chen, S-H. Chen, M-H. Chiang, National Cheng Kung University, TW
Excellent bipolar resistive switching behavior in WN thin film for non-volatile ReRAM device
R. Prakash, D. Kaur, Indian Institute of Technology Roorkee, Roorkee, Uttarakhand, India, IN
CarrICool – the Innovative 3D Interposer Platform for HPC Systems: Analysis, Simulations, Optimization, Practice for Reliability Improvement and Performance Increase
G. Janczyk, T. Bieniek, Instytut Technologii Elektronowej, PL
Hydrogen Sensors Based on Noble Metal catalytic dots on RF Sputtered Nanocrystalline ZnO Thin film
L. Rajan, C. Periasamy, V. Sahula, Malaviya National Institute of Technology, IN
Amorphous Si nanoparticles and nano-ink for printed and flexible electronics
B. Jang, B. Jang, Korea institute of energy research, KR
Novel Polymer Substrates for Printed Electronics by Continuous Extrusion
A. Panwar, J. Mead, C. Barry, C. Lepont, R. Vaghani, J. Desrochers, A. Akyirtlu, A. Dericioglu, SE. Hajisaeid, M. Haghzadeh, M. Herndon, D. Rockosi, University of Massachusetts Lowell, US
Enhancement of Field-Effect Mobility by controlling the surface potential of PVP Insulator in Pentacene-based Thin Film Transistors
Y. Jang, K-Y Kim, J. Jo, KIMM, KR
Phosphor-in-Glass Color Converter Based On A Low-Melting Precursor Glass For Long-Lifetime Warm W-LEDs Application
X. Xiang, B. Wang, H. Lin, Y. Wang, Fujian Institute of Research on the Structure of Matter, Chinese Academy of Sciences, CN

This symposium focuses on emerging, industrially relevant, applications and advanced fabrication, modeling, materials, and devices, for Micro Electro Mechanical Systems (MEMS), Nano Electro Mechanical Systems (NEMS) and sensors. Submit your technical abstract today and join the leading innovators from industry, academic and government laboratories around the world providing new microtechnology solutions to the world's top corporate technology integrators.

Topics & Application Areas

  • Novel Materials for MEMS & NEMS
  • Novel MEMS & NEMS Fabrication & Processes
  • Optical MEMS & NEMS
  • Actuating Devices
  • RF MEMS & NEMS, Resonators & Oscillators
  • MEMS & NEMS Sensors
  • MEMS & NEMS Energy Harvesting
  • Medical Devices
  • Novel MEMS & NEMS Devices
  • MEMS Device Modeling
  • Device & Circuit Simulation
  • Other

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Korusip
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UTC

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Supporting Partners
ACCT
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