Nanomanipulators with reduced hysteresis and interferometers build in NanoFabs

P.N. Luskinovich, V.A. Zhabotinskiy
NANOmeter Standard GmbH, DE

Keywords: nanomanipulator, interferometer, measures of displacement


The use of nanomanipulators made on the base of monocrystals characterized inverse piezoelectric effect and many times, in comparison with piezoceramic, less hysteresis and creep, allows to achieve the following results: - Shorten the time frame measuring more than 2 times (due to the possibility of the use of information by scanning the back row). - Shorten the time of compensation the error of displacement. - Reduction of more than 10 times the positioning time and productivity of a NanoFab by vector instead of raster positioning. - Integration of standard length (measures of displacement) with actuators (piezo manipulators). The Interferometers are designed for : - Optical displacement sensors with subnanometer uncertainty. - Compact tools for three-coordinate measuring displacement of the manipulator based on a piezo-tube, widely used in scanning probe microscopes and probe nanotechnological systems. - Metrological scanning probe microscopes (atomic force, tunnel, etc.), as well as probe nanotechnological systems reproducibly creating 3-dimensional nanodevices.