Reliability and Robustness Investigation of 3D Vertically Stacked Silicon Nanowire Structures Using AFM Based Techniques

T. Bieniek
Instytut Technologii Elektronowej, PL

Keywords: Si nanowires, reliability, AFM, nano characterisation


The paper will address the applied investigation methodology along with achieved results of several tests performed on various types of vertically stacked silicon nanowires structures by using the AFM-based technics.