Reliability and Robustness Investigation of 3D Vertically Stacked Silicon Nanowire Structures Using AFM Based Techniques

T. Bieniek
Instytut Technologii Elektronowej, PL

Keywords: Si nanowires, reliability, AFM, nano characterisation

Summary:

The paper will address the applied investigation methodology along with achieved results of several tests performed on various types of vertically stacked silicon nanowires structures by using the AFM-based technics.