3-axis Capacitive Low-Gravity MEMS Accelerometer with Zero Cross-Axis Sensitivity in a Commercial Process

A. Merdassi, V.P. Chodavarapu
McGill University, CA

Keywords: low-g accelerometers, MEMS sensors, capacitance sensing, microfabrication, SOIMUMPS

Summary:

We describe integrated multi-axis low-g MEMS accelerometer devices fabricated in a commercial SOIMUMPS process available from MEMSCAP. We employ capacitive transduction mechanism which provides high reliability, low temperature sensitivity, low drift, and low power consumption. We introduce a new technique to reduce or eliminate the cross-axis sensitivity based on the design of using both decoupled frames and different mechanical springs that are sensitive for each specific axis.