Analysis of materials Surfaces: Sb-SnO2 and In2O3 used as spatial gas sensors

O. Abdallah
Université de Khemis Miliana, DZ

Keywords: SnO2, In2O3, AES, EELS, sensors


The two Metal Semiconductor oxide (MOS) SnO2 and In2O3 are the most commonly encountered and widely employed as spatial gas sensors materials. They are capable of monitoring gas concentration in the parts per million (ppm) or parts per billion (ppb) ranges. Our aim is to develop these gas sensors and to characterize their surfaces using appropriates spectroscopies. We study the two oxides SnO2 doped Sb on SiO2 substrate and In2O3 on InP substrate taken as surfaces acoustic waves (SAWs) owing to AES (Auger Electron Spectroscopy), EELS (Energy Electron Loss spectroscopy), Energy dispersive analysis (EDX) and Casino Monte Carlo program. Our work will be focused on the characterization of thin oxide SnO2 growth using spray method deposition on SiO2 substrate and the analysis of thin oxide In2O3 created by Ar+/O2- erosion on InP(100) substrate.Optical and electrical characteristics are recorded in order to show the performance of our devices in the aim to be used as gas spatial sensors. Dr A. Ouerdane