Nanoceramic MEMS Sensors for Universal Embedded Chemical Sensing

C.J. Kostelecky, C. Sneider, R. Wind, D.J. Deininger
Synkera Technologies Inc., US

Keywords: sensors, gas sensors, nanotechnology, MEMS

Summary:

This abstract describes recent developments in a nanoceramic MEMS platform used for chemical sensing. These advances enable the addition of environmental awareness to many other consumer and commercial devices, including smart phones.