NanoFab: Manufacturing & Instrumentation

NanoFab: Manufacturing & Instrumentation

Symposium Co-Chairs

Jason HaaheimJason Haaheim
Senior R&D Engineer, NanoInk, Inc.
Guy A. DeRoseGuy A. DeRose
Associate Director of Technical Operations
Kavli Nanoscience Institute, CALTECH
Aaron SteinAaron Stein
Electronic Materials: Nanofabrication
Brookhaven National Laboratory

Keynote Event: Innovations in Nanomanufacturing

Ahmed A.  BusnainaAhmed A. Busnaina
Director, NSF Nanoscale Science and Engineering Center for High-rate Nanomanufacturing (NSEC)
Northeastern University
Robert J.  CelottaRobert J. Celotta
Founding Director
NIST Center for Nanoscale Science and Technology
John N.  RandallJohn N. Randall
Zyvex Labs
Jason HaaheimHigh-Throughput Large-Area Direct-Write Nanofabrication with Full Automation
Jason Haaheim
Senior R&D Engineer, NanoInk, Inc.
Xiaobo  YinA Scalable and Reliable Manufacturing Solution with Sustainable Future
Xiaobo Yin
Research Manager, Center for Scalable and Integrated nanomanufacturing (SINAM), UC Berkeley

Symposium Sessions

Tuesday June 19

12:30 Networking Lunch - Expo
1:30 Keynote Event: Innovations in Nanomanufacturing
6:00 Thermo Hands-on Workshop & Reception: Combined Approaches to Graphene and Carbon Analysis Using Raman Spectroscopy (6:00 - 9:00)
4:30 Expo Reception and Poster Session I (4:30 - 6:30)

Wednesday June 20

11:00 NanoFab: Nanofabrication II
12:30 Networking Lunch - Expo
1:00 NNI - Director’s Networking Session, National Nanotechnology Coordination Office
1:30 Exhibit and Poster Session II
 NanoFab: Manufacturing & Instrumentation
4:00 NanoFab: Novel Optical Lithography Methods
5:30 TechConnect Innovation Showcase Reception
6:00 CTSI Utility Technology Challenge Awards and Reception

Thursday June 21

8:30 NanoFab: Avanced Top Down Techniques
10:00 National Nanotechnology Initiative Triennial Review
11:00 NanoFab: Nanomaterial-Optical Interactions
12:30 National Innovation Showcase - Networking Lunch (available for purchase)
1:30 NanoFab: Synthesis and Applications of Nanomaterials
4:00 TechConnect National Innovation Showcase, Reception & Poster Session III

Symposium Program

Tuesday June 19

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12:30Networking Lunch - ExpoExpo Hall AB
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1:30Keynote Event: Innovations in NanomanufacturingRoom 210
Session chair: Lisa E. Friedersdorf, National Nanotechnology Coordination Office, US
1:30Nanomanufacturing at NIST and the Center for Nanoscale Science and Technology
R.J. Celotta, NIST Center for Nanoscale Science and Technology, US (bio)
2:00Rethinking Manufacturing; Nanomaterials Based Nanomanufacturing for Electronics, Energy and Biotechnology Applications
A.A. Busnaina, Northeastern University, US (bio)
2:30High-Throughput Large-Area Direct-Write Nanofabrication with Full Automation
J. Haaheim, NanoInk Inc., US (bio)
3:00A Scalable and Reliable Manufacturing Solution with Sustainable Future
X. Yin, University of California, Berkeley, US
3:30The Innovation of Precision: To Realize its Promises, Nanotechnology Needs Nano-precision
J. Randall, Zyvex, US (bio)
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6:00Thermo Hands-on Workshop & Reception: Combined Approaches to Graphene and Carbon Analysis Using Raman Spectroscopy (6:00 - 9:00)Grand Ballroom E
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4:30Expo Reception and Poster Session I (4:30 - 6:30)Expo Hall AB

Wednesday June 20

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11:00NanoFab: Nanofabrication IIGreat America J
Session chair: Ahmed Busnaina, Northeastern University, US
11:00Direct Printing of Nano-and Microscale Transition Metal Features
A.B. Smetana, J-W Jang, P. Adamczyk, J. Ngunjiri, S. Nettikandan, Nanoink, Inc., US
11:20Directed Self Assembly: a Novel, High Speed Method of Nanocoating Ultra-thin Films and Monolayers of Particles
G.A. Powch, A.R. Jain, VersuFLEX Technologies LLC, US
11:40Fabrication of controlled linear assemblies of graphite nanosheets in polysiloxane-based nanocomposite films and enhancement of thermal property
H.-B. Cho, S. Yanahara, T. Nakayama, H. Suematsu, T. Suzuki, W. Jiang, S. Tanaka, K. Niihara, Nagaoka University of Technology, JP
12:00Semiconducting Nanowire Networks: Manufacturing Opportunity and Scientific Curiosity
A.J. Lohn, K.J. Norris, J. Zhang, D. Fryauf, N.P. Kobayashi, University of California Santa Cruz, US
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12:30Networking Lunch - ExpoExhibit Hall AB
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1:00NNI - Director’s Networking Session, National Nanotechnology Coordination OfficeExhibit Hall A
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1:30Exhibit and Poster Session IIExhibit Hall AB
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NanoFab: Manufacturing & Instrumentation
-Standards of length at the nanoscale based on movement gages and their measurement with sub-nanometric uncertainty
P.N. Luskinovich, V.A. Zhabotinsky, I.A. Lubashevsky, NANOMETER Standard GmbH, DE
-Mechanical fabrication of graphene devices using focused-ion beam: deposition and milling
N. Lei, Z. Chen, D. Kim, W. Xue, J. Xu, Washington State University, US
-Micro-Assembly Platform for Developing In-Vivo Biosensor Devices
A. Malima, A.A. Busnaina, Northeastern University, US
-Tunable-Linewidth Nanoimprint Working Stamps Fabricated by Double Oblique Metal Deposition
C.H. Lin, C.L. Wu, C.K. Sung, National Tsing Hua University, TW
-Multiple surfaces pretreatments of nanoporous SiO2-based dielectric layers for electroless plating of copper
G.S. Chen, Feng Chia University, TW
-Investigation of Metal Nano Layer Formation by the Tunneling Current through the Thin Oxide Film in the Electrolyte–Oxide–Silicon System
S-H Lee, J.H. Cheon, Y. Choi, S. Choi, Y.J. Park, Seoul National University, KR
-A new method for vertical growth of silicon nanowire in the vapor-liquid-solid (VLS) process
Y.J. Kim, D. Suh, M.L. Lee, H. Ryu, Electronics and Telecommunications Research Institute (ETRI), KR
-Synthesis of silicon nanoparticles by picosecond laser ablation in liquid
D.M. Popovic, University of Belgrade-Faculty of Physics, RS
-Characterization of Refined Beams of Neutral Free Radicals Produced by Photo-Deionization of Negative Ion Beams
K. Hayashi, F. Tanaka, T. Sugiura, T. Matsuda, Kanazawa Institute of Technology, JP
-Computer Simulations and Experimental Study of Graphane-Like Materials Produced by Electrolytic Hydrogenation
A.M. Ilyin, R.R. Nemkaeva, N.R. Guseinov, I.A. Tsyganov, G.W. Beall, Kazakh National University, KZ
-Robust thin spin-coated silver films with polymer thin layers for SPR image sensor applications
J.-H. Son, Y.-J. Cho, M.-H. Lee, Sungkyunkwan University, KR
-A nanoscale machine shop for NWs
G.J. Cheng, Ji Li, Purdue University, US
-Large Area ICP Atmospheric Nanocoating System for Deposition of YSZ Electrolyte
Y. Glukgoy, A. Ryaboy, T. Kerzhner, Nanocoating Plasma Systems Inc., US
-A Pressure Controlled Pinched Flow Fractionation Device for Continuous Particle Separation
J. Trosborg, T.L. Christiansen, Technical University of Denmark, DK
-Numerical Study for Pressing Process in Inverse NIL Fabrication
S-J Lin, A.L. Le, Y-W Chen, National Kaohsiung University of Applied Sciences, TW
-Novel fabrication process of silicon nano-field effect transistor for ultrasensitive detection analysis
N.N. Mishra, E.C. Cameron, University of Idaho, US
-Effects of Double-Side Patterning for Enhancement of Light Extraction Efficiency in GaN-based LEDs.
K.J. Kim, H.K. Lee, G.M. Go, B.J. Kim, Y.H. Song, K. Kim, J-L Lee, Pohang University of Science and Technology (POSTECH), KR
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4:00NanoFab: Novel Optical Lithography MethodsGreat America 3
Session chair: Guy A. DeRose, Kavli Nanoscience Institute CALTEC, US
4:00Nanoscale Superplastic forming of Metallic Thin Films under Laser Shock
G.J. Cheng, Y. Yang, H. Gao, Purdue University, US
4:20Towards nanofabrication with UV femtosecond fiber laser
H. Huang, L-M. Yang, J. Liu, PolarOnyx, Inc., US
4:40Direct Manufacturing of Functional Structures on 3D microscale surfaces by Laser Dynamic Forming
G. Huang, G.J. Cheng, Purdue University, US
5:00All polymer, injection molded nanoslits, fabricated through two-level UV-LIGA processes
P.F. Østergaard, M. Mateucci, R. Marie, A. Kristensen, R. Taboryski, Technical University of Denmark, DK
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5:30TechConnect Innovation Showcase ReceptionExpo Hall CD
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6:00CTSI Utility Technology Challenge Awards and ReceptionExpo Theater 1
Session chair: Patti Glaza, Arsenal Venture Partners, US

Thursday June 21

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8:30NanoFab: Avanced Top Down TechniquesGrand Ballroom C
Session chair: Lisa E. Friedersdorf, National Nanotechnology Coordination Office, US
8:30A study of the Demolding Force in Nano Imprint Lithography For Different Surface Treatments.
S.N. Moon, J.M. Jung, K.M. Lee, W.I. Lee, Seoul National University, KR
8:50Nanovias FIB-etching and filling in a micro-nano interposer for molecular electronics
G.L. Gac, G. Audoit, A. Thuaire, C. Rauer, H. Moriceau, X. Baillin, CEA Grenoble, FR
9:10Milling Process Control with Dimensional Feedback on a Focused Ion Beam - Scanning Electron Microscope System (FIB-SEM)
J.E. Sanabia, Raith USA, Inc., US
9:30Fabrication of polymer-derived ceramic nanostructures by imprint lithography
B. Duong, P. Gangopadhyay, J. Brent, S. Seraphin, J. Thomas, University of Central Florida, US
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10:00National Nanotechnology Initiative Triennial ReviewGreat America 1
Session chair: Erik Svedberg, National Materials and Manufacturing, National Academies, US
10:00NNI Town Hall Meeting
E. Svedberg, National Nanotechnology Initiative, US
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11:00NanoFab: Nanomaterial-Optical InteractionsGrand Ballroom C
Session chair: Xiaobo Yin, University of California Berkeley, US
A. Stein, K. Evans-Lutterodt, Brookhaven National Laboratory, US
11:30Efficiency Enhancement of Dye-Sensitized Nanocrystalline Solar Cells Through Fabrication
11:50Nanostructured Materials for Thin Film Solid Li Batteries, Technology and Equipment for Fabrication and Testing
E. Shembel, V. Redko, T. Pastushkin, N. Klyui, V. Tutyk, A. Markevich, I. Maksuta, V. Khandetskyy, Enerize Corporation, US
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12:30National Innovation Showcase - Networking Lunch (available for purchase)Expo Hall CD
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1:30NanoFab: Synthesis and Applications of NanomaterialsGrand Ballroom C
Session chair: Lisa E. Friedersdorf, National Nanotechnology Coordination Office, US
2:00Functionalization of self-organized networked SiOxHyCz nano-islands deposited by atmospheric pressure microwave plasma torch on Au/Si(100) substrates patterned by nano-indentation
X. Landreau, B. Boëns, B. Lanfant, T. Merle, G. Bouscarrat, C. Dublanche-Tixier, R. Zerrouki, P. Tristant, Université de Limoges, FR
2:20Controlled Synthesis of Fluorapatite Nanorods for Directed Self Assembly By Electrophoretic Deposition
T.Y. Olson, C.A. Orme, T.Y. Han, A.J. Pascall, M.A. Worsley, J.H. Satcher, J.D. Kuntz, Lawrence Livermore National Laboratory, US
2:40A novel cyclic forward-backward extrusion process for production of ultrafine grains materials
H. Alihosseini, M. Asle Zaeem, K. Dehghani, Mississippi State Univeristy, US
3:00Design and Fabrication of a Large Scale Electric Field Array Device for Directed Self-Assembly of Multilayer BioDerivatized Nanoparticle Materials.
M.J. Heller, Y. Song, University of California San Diego, US
3:20Multifunctional n-ZnO/p-NiO Nano-heterostructures: A novel Approach
N. Hullavarad, S. Hullavarad, University of Alaska Fairbanks, US
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4:00TechConnect National Innovation Showcase, Reception & Poster Session IIIExpo Hall CD

NanoFab Symposium

NanoFab 2012 consists of the latest research and development in nanofabrication technologies, devices and applications. The key to realize nanotechnology's potential is still the ability to assemble and manufacture nano-scale devices, structures with dimensions smaller than 100nm. This conference focuses on all areas of nanofabrication that will accelerate nanotechnology's progress: innovative research to state-of-the-art development to cost-effective manufacturability in nanofabrication processes and technologies for current and novel devices and applications, including enabling and differentiating aspects in materials, metrology, characterization, and reliability. The primary focus is on innovative fabrication that significantly advances current application and enables novel nano-application.

Nanofabrication papers that have significant overlap with other Nanotechnology Symposia at Nanotech 2012 may be presented in joint sessions to enhance the synergism of the Nanotechnology Programs.

Conference Chairs

Jason Haaheim, NanoInk, Ink.
Guy A. DeRose, California Institute of Technology
Aaron Stein, Brookhaven National Laboratory

Topics & Application Areas

  • Nanoscale Manufacturing - General
  • Novel Material Processes
  • Novel Nanoscale Device Fabrication
  • High Volume Nanoscale Manufacturing
  • Advances in Direct-Write Nanoscale Deposition & Patterning
  • Advances in Bottom-Up Approaches to Nano-Composites & Nano-Particles
  • Non-Conventional Nano-Patterning: Top Down/Bottom Up Convergence
  • Harnessing Nanofabrication for Pharmaceutical Applications: biosensors, drug delivery, screening
  • Symbiotic technologies in Nanofabrication & Inspection: patterning, deposition, microscopy & spectroscopy
  • Other

Journal Submissions

Experimental Nanoscience

Journal of Experimental Nanoscience

Selected Nanotech Proceedings papers will be reviewed and invited into a Special Issue of the Journal of Experimental Nanoscience. The journal provides a showcase for advances in the experimental sciences underlying nanotechnology and nanomaterials.

For consideration into this Special Issue of the Journal of Experimental Nanoscience, please select the “Submit to Journal of Experimental Nanoscience” button during the on-line submission procedure.

Microelectronics Journal

Microelectronics Journal

Published since 1969, Microelectronics Journal is an international forum for the dissemination of research into, and applications of, microelectronics. Papers published in Microelectronics Journal have undergone peer review to ensure originality, relevance and timeliness. The journal thus provides a worldwide, regular and comprehensive update on microelectronics.

For consideration into the Microelectronics Journal please select the “Submit to Microelectronics Journal” button during the on-line submission procedure.


Sponsor & Exhibitor Opportunities

 Exhibit and Showcase
 Become a Sponsor

Please contact: Denise Lee

Program Tracks

Fabrication & Characterization

Advanced Materials

Electronics & Microsystems

Medical & Biotech

Energy & Environment

Business & Partnering


2012 TechConnect Corporate Acceleration Partners:

Applied Materials
Fraunhofer TechBridge
Kauffman Foundation
Lockheed Martin
SK Innovation

In Partnership with


Sponsorship Opportunities: Contact Denise Lee

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