Experimental analysis of the MEMS Capacitive accelerometer’s shock resistibility

Y. Tao, Y. Liu, J. Dong
Tsinghua University, CN

Keywords: shock resistibility, MEMS accelerometer, HPB, experimental estimation


The shock resistibility of MEMS device has been an urgent issue in the field of consumer electronics, automotive industry and special military applications. The paper analyses experimentally the shock resistibility of a typical MEMS capacitive accelerometer’s micro-structure by Hopkinson Pressure Bar (HPB) apparatus.The paper gives the experiment estimation of the three-orientation shock resistibility of the MEMS accelerometers’ micro-structure. The experiment results correspond with the FEA impact dynamic simulations in our previous work to a certain extent.Comparison of the results of different directions indicates that the spring stiffness and stoppers’ areas are the key factors to determine the shock resistance. It also shows that the pulse duration plays a critical role in the shock effects of micro-machined structures. The paper provides meaningful guides to improve the shock reliability of MEMS accelerometers. The research methods mentioned may also be applied to the experimental estimation of the shock reliability of other MEMS device.