MD Simulations on the Momentum Transfer to Nano Contaminant Particle on Wafer Surface in Collisions with Cleaning Bullets

M.S Choi, J.W Lee
POSTECH, KR

Keywords: MD, nano cleaning, momentum transfer

Summary:

This study aims to clarify the basic mechanism through MD simulations on momentum transfer during collisions between target contaminant and cleaning bullet particles both in the nanometer size range. Even in conditions where the contaminant particle was successfully removed from the surface, the fraction of the bullet kinetic energy transferred to the target particle was very small - 0.066 with Ar bullet, and even smaller - 0.02 with N2 bullet.For a given bullet particle, the fraction of transferred kinetic energy was nearly constant regardless of the velocity and the size of the bullet particle.