Advances in MEMS Fabrication for Fabless MEMS Companies

M. Lim, M. Daneman
InvenSense, US

Keywords: fabless MEMS CMOS-MEMS

Summary:

InvenSense, a fabless MEMS company has successfully transferred its proprietry fabriction process has been to multiple foundries to support high volume production of multiple products. The process supports CMOS electronics integration and incorporates wafer level packaging. These advances to the state of MEMS manufacturing provides fabless MEMS companies an alternative to a costly and time consuming process development cycle and a direct path to high volume production.