Nanotech 2011

Co-design of Heterogeneous Microsystems

Mary Ann Maher

Mary Ann Maher

CEO

SoftMEMS, LLC

Mary Ann Maher is the CEO of SoftMEMS LLC. She received her PhD degree from Caltech in the area of semiconductor device modeling. She subsequently conducted post- doctoral studies at the Swiss Center for Electronics and Microtechnology (CSEM) in Neuchatel, Switzerland and joined Tanner Research in 1992. She moved to MEMSCAP in 1999 as an Executive Vice President and became the company's CTO in 2001. She founded SoftMEMS LLC in 2004 which provides computer aided design tools to enable the co-design of sensors, electronics and packaging.

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